2017
DOI: 10.1016/j.mssp.2017.08.006
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EPR and Raman study of silicon layers obtained by gas detonation spraying

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Cited by 3 publications
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“…The XRD patterns show that the Si and SiN x films on Zn or stainless steel (SS) substrates are both amorphous (Figure a and Figure S1). The Raman spectra of Si and SiN x films indicate that the peaks at ∼474.2, ∼620.6, and ∼948.5 cm –1 arise from the transverse optical (TO), transverse acoustic (TO + TA), and 2TO modes of a Si film, which are associated with the vibration of Si–Si bonds (Figure b). , However, the peak at 1332 cm –1 arises from the F 2g mode of Si–N bonds. , The weaker intensity and broader half-width of the Si (TO) mode of a SiN x film indicate an increased disorder of the SiN x layer, which is likely caused by the Si DBs and N sites. , As Figure S2 depicts, the Si–N bonds of a SiN x film at ∼910 cm –1 can also be identified by Fourier transform infrared spectroscopy (FTIR) . The chemical states of the Si and SiN x films were subsequently detected by X-ray photoelectron spectroscopy (XPS).…”
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confidence: 99%
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“…The XRD patterns show that the Si and SiN x films on Zn or stainless steel (SS) substrates are both amorphous (Figure a and Figure S1). The Raman spectra of Si and SiN x films indicate that the peaks at ∼474.2, ∼620.6, and ∼948.5 cm –1 arise from the transverse optical (TO), transverse acoustic (TO + TA), and 2TO modes of a Si film, which are associated with the vibration of Si–Si bonds (Figure b). , However, the peak at 1332 cm –1 arises from the F 2g mode of Si–N bonds. , The weaker intensity and broader half-width of the Si (TO) mode of a SiN x film indicate an increased disorder of the SiN x layer, which is likely caused by the Si DBs and N sites. , As Figure S2 depicts, the Si–N bonds of a SiN x film at ∼910 cm –1 can also be identified by Fourier transform infrared spectroscopy (FTIR) . The chemical states of the Si and SiN x films were subsequently detected by X-ray photoelectron spectroscopy (XPS).…”
mentioning
confidence: 99%
“…33,34 The weaker intensity and broader half-width of the Si (TO) mode of a SiN x film indicate an increased disorder of the SiN x layer, which is likely caused by the Si DBs and N sites. 34,35 As Figure S2 depicts, the Si−N bonds of a SiN x film at ∼910 cm −1 can also be identified by Fourier transform infrared spectroscopy (FTIR). 36 The chemical states of the Si and SiN x films were subsequently detected by X-ray photoelectron spectroscopy (XPS).…”
mentioning
confidence: 99%