Artificial [(Nd 2 Ti 2 O 7 ) 4 /(SrTiO 3 ) n ] 10 superlattices (n ¼ 4 and 8) were successfully epitaxially grown on SrTiO 3 substrates by pulsed laser deposition using the in situ high energy electron diffraction reflection diagnostic. Scanning transmission electron microscopy energy dispersive spectroscopy analysis showed the diffusion of Nd 3+ cations on Sr 2+ sites in SrTiO 3 structure into the multilayers, which was more pronounced when the value of n was lower. These particular nanoscale electrical behaviors, evidenced by electrical conducting channels and misleading PFM signals, were mainly attributed to the presence of oxygen vacancies in the SrTiO 3 layers at higher concentrations near the interface and to the mixed valence state of the titanium (Ti 3+ /Ti 4+ ). This work showed the strong influence of interface structure on nanoscale electrical phenomena in complex oxide superlattices.