Epitaxial Ru Nanowire on Single-Crystalline Graphene for Advanced Interconnect Application
Zonghuan Lu,
David M. Frey,
Neha Dhull
et al.
Abstract:In
this work, we study epitaxial Ru metallic nanowire on graphene
as a model material for future interconnect applications. We first
grew epitaxial Ru ultrathin film on single-crystalline, monolayer
graphene on SiO2 substrate. We demonstrated fabrication
of epitaxial Ru nanowires on graphene using high-resolution H-SiQ
ebeam lithography and reaction ion etching techniques. The epitaxial
Ru nanowires were prepared using O2/Cl2 dry
etching chemistry with ebeam patterned H-SiQ as the etching mask on
pregrown Ru t… Show more
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