Epitaxial growth of ZnO films by helicon-wave-plasma-assisted sputtering

Fu, Guangsheng; Xu, Hui; Wang, Shufang; Yu, Wei; Sun, Wei; Han, Li

doi:10.1016/j.physb.2006.01.535

Cited by 3 publications

(1 citation statement)

References 15 publications

(14 reference statements)

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“…Fused quartz has also been used in other large diameter helicon plasma sources [7], and widely used as a gas containment tube material in helicon plasma sources for plasma-assisted coating and sputtering applications [8], (where commonly referred to as a 'discharge tube'). Pyrex ® has also been used as a GCT material in low power helicon plasma sources [9,10].…”

Section: Introductionmentioning

confidence: 99%

A review of the processing, composition, and temperature-dependent mechanical and thermal properties of dielectric technical ceramics

et al. 2011

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The current review uses the material requirements of a new space propulsion device, the Variable Specific Impulse Magnetoplasma Rocket (VASIMR ® ) as a basis for presenting the temperature dependent properties of a range of dielectric ceramics, but data presented could be used in the engineering design of any ceramic component with complementary material requirements. A material is required for the gas containment tube (GCT) of VASIMR ® to allow it to operate at higher power levels. The GCT's operating conditions place severe constraints on the choice of material. A dielectric is required with a high thermal conductivity, low dielectric loss factor, and high thermal shock resistance. There is a lack of a representative set of temperature-dependent material property data for materials considered for this application and these are required for accurate thermo-structural modelling. This modelling would facilitate the selection of an optimum material for this component. The goal of this paper is to determine the best material property data values for use in the materials selection and design of such components. A review of both experimentally and theoretically-determined temperature-dependent & room temperature properties of several materials has been undertaken. Data extracted are presented by property. Properties reviewed are density, Young's, bulk and shear moduli, Poisson's ratio, tensile, flexural and compressive strength, thermal conductivity, specific heat capacity, thermal expansion coefficient and the factors affecting maximum service temperature. Materials reviewed are alumina, aluminium nitride, beryllia, fused quartz, sialon and silicon nitride.

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