Epitaxial growth of self-arranged periodic ZnO nanostructures on sapphire substrates grown by MOCVD

Chen, Hou-Guang; Jian, Sheng-Rui; Chen, Kuan-Wei; Li, Jhih-Cheng

doi:10.1016/j.jallcom.2010.02.195

Cited by 10 publications

(6 citation statements)

References 20 publications

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“…The band gap of ZnO films are 3.37 eV, which corresponding to the wavelength of 370 nm. Optical properties of both sol-gel and sputter coated films well agree with the reported properties of intrinsic semiconducting ZnO [1][2][3][4][5][6][7][8][9][10]. However, for the sol-gel coated films, the band-gap is slightly broadened to both sides compared with the sputter deposited films.…”

Section: Optical Propertiessupporting

confidence: 81%

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Manufacturing of Multifunctional Nanocrystalline ZnO Thin Films

Jayatissa

Soleimanpour

Hao

2011

AMR

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Optical, surface and structural properties of ZnO thin films fabricated by reactive radio- frequency (rf) magnetron sputtering and sol-gel coating methods are comparatively investigated. The optical properties of films produced by both techniques have very similar characteristics, however; the surface morphology and degree of crystallinity have different behaviors. The nanostructure columnar zinc oxide thin films can be synthesized by sol-gel coating methods which can have numerous applications requiring larger surface area. Also, the process scalability and large-scale manufacturing of these materials are discussed. It indicated that the nanostructure ZnO thin films can be synthesized with sol-gel methods at wafer levels with nano-grains and improved surface properties compared with reactive rf magnetron sputtering deposition.

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Section: Optical Propertiessupporting

confidence: 81%

“…ZnO thin can be fabricated in many ways such as magnetron sputtering [4,5], sol-gel coating [6,7] and chemical vapor deposition (CVD) [8,9] methods. These methods have advantages and disadvantages depending on the applications and expected film qualities.…”

Section: Introductionmentioning

confidence: 99%

Manufacturing of Multifunctional Nanocrystalline ZnO Thin Films

Jayatissa

Soleimanpour

Hao

2011

AMR

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“…So far, ZnO nanostructures have been synthesized on sapphire substrates by various methods, including sputtering, 1) metal organic chemical vapor deposition, 2) hydrothermal method 3) and thermal evaporation. 4) Among these methods, the thermal evaporation method has been widely employed because of low cost and simplicity.…”

Section: Introductionmentioning

confidence: 99%

Effect of the O2/N2 Ratio on the Growth of ZnO Nanostructures on c-Plane Sapphire Substrate via Thermal Evaporation Technique

Lee

2015

Mater. Trans.

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ZnO nanostructures were grown on c-plane sapphire substrate in an oxygen and nitrogen gas environment at 1000°C by thermal evaporation of Zn powder without using catalyst. The ZnO nanostructures were synthesized at different O 2 /N 2 ratios in order to investigate the effect of O 2 /N 2 ratio in ambient gas on the morphology, crystal structure and cathodoluminescence of ZnO nanostructures. No nanostructures were grown on the substrate in a N 2 environment. As the ratio of O 2 to N 2 increased, ZnO nanostructures with wire shape began to be grown on the substrate. In addition, tilted nanowires, which were grown with tilt angles with respect to the substrate plane, were observed. With further increasing the ratio of O 2 to N 2 , the size of nanostructures increased. The intensity of visible emission in CL spectra increased with the increase in the ratio of O 2 to N 2 .

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“…This concept has been regarded as a cost-effective way to grow spatially ordered nanostructures over macroscopic scales. In our previous works [13], we have reported that self-organized periodic ZnO nanostructures were grown on the periodically faceted a-Al 2 O 3 (sapphire) surfaces by MOCVD without the need for any complicated lithography or pre-patterned catalyst. In this study, a modified method, combining CVD epitaxial growth with low temperature hydrothermal processing, has been devised for the formation of epitaxial ZnO nanostructures with directional alignment and self-organized periodicity on c-and a-plane sapphire substrates, respectively.…”

Section: Introductionmentioning

confidence: 99%