Epitaxial growth of lithium niobate film using metalorganic chemical vapor deposition

Akiyama, Yoshikatsu; Shitanaka, Katsuya; Murakami, Hiroshi; Shin, Young Sik; Yoshida, M.; Imaishi, Nobuyuki

doi:10.1016/j.tsf.2006.10.034

Cited by 39 publications

(23 citation statements)

References 17 publications

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“…Optical waveguides comprised of hetero-materials efficiently confine propagating light because of large difference in refractive indices between the film and the substrate [13]. Therefore, LiNbO3s have been grown by several techniques including liquid-phase epitaxy [14], Ion Beam Sputtering [15], RF magnetron sputtering [16], molecular beam epitaxy [17], metalorganic chemical vapor deposition [18], pulsed-laser deposition (PLD) [19], thermal plasma spray chemical vapor deposition [20], electron-cyclotron-resonance (ECR) plasma sputtering [21], electron beam irradiation [22] and pulsed laser ablation (PLA) [23].…”

Section: Introductionmentioning

confidence: 99%

The structure and optical properties of Lithium Niobate grown on quartz for photonics application

et al. 2017

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Abstract. This paper focuses on the structure and optical properties of Lithium niobate (LN) deposited on quartz substrate by sol-gel method. The solution was prepared at different molarity concentration and annealed at 500 o C. The LNs were analyzed by UV-visible, X-ray diffraction (XRD) and Scanning Electron Microscope (SEM). The results show that as the molar concentration increases, the films crystallization becomes more atomically distributed and the energy band gap approaches 4 eV. Transmission spectra were taken in the wavelength range of 400-1100 nm. Hexagonal structure was observed with good atoms distribution and homogeneous crystallization. There were two phases of LNs recorded in this work.

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Section: Introductionmentioning

confidence: 99%

The structure and optical properties of Lithium Niobate grown on quartz for photonics application

et al. 2017

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“…The first reports on the growth of c ‐axis‐oriented LN films by liquid phase epitaxy on an LT substrate and by RF sputtering on C ‐sapphire substrates appeared in early seventies . Since then these substrates were widely studied for the growth of the Z ‐LN and Z ‐LT films by different methods: LPE, epitaxial growth by melting, RF sputtering pulsed laser deposition (PLD), molecular beam epitaxy (MBE), metal organic, and aqueous precursor solutions, sol–gel, spin coating, microwave oven method, and chemical vapor deposition (CVD) and its derivatives such as thermal plasma CVD, pulsed metal–organic CVD (MOCVD), pulsed‐injection (PI) MOCVD, spray MOCVD, atmospheric pressure aerosol MOCVD, solid source flash evaporation, combinatorial high‐vacuum CVD, atomic layer deposition (ALD), etc. In the following sections, we summarize the problems and the applied strategies for the optimization of growth of high‐quality LN–LT layers.…”

Section: Growth Of Linbo3 and Litao3 Films By Chemical And Physical Mmentioning

confidence: 99%

“…Numerous publications were dedicated to the elimination of the formation of the Li‐poor or Li‐rich secondary phases ((LiNb(Ta) 3 O 8 or Li 3 Nb(Ta)O 4 ) and to optimize the growth of single‐phase LN/LT films. The standard technique used for phase compositional analysis of LN/LT films is X‐ray diffraction (XRD) . In the case of a system containing two phases, the orientation of the inclusions of the secondary phase in the film matrix is defined by the minimum of the interface energy .…”

Section: Growth Of Linbo3 and Litao3 Films By Chemical And Physical Mmentioning

confidence: 99%

Toward High‐Quality Epitaxial LiNbO₃ and LiTaO₃ Thin Films for Acoustic and Optical Applications

Bartasyte

Margueron

Baron

et al. 2017

Adv Materials Inter

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In 1928, Zachariasen discovered the LiNbO 3 phase. [1] The first single crystals were grown using the flux method by Matthias Over the past five decades, LiNbO 3 and LiTaO 3 single crystals and thin films have been studied intensively for their exceptional acoustic, electro-optical, and pyroelectric and ferroelectric properties. Today, LiNbO 3 single crystals in electro-optics are equivalent to silicon in electronics, and about 70% of radio-frequency (RF) filters, based on surface acoustic waves, are fabricated on these single crystals. These materials in the form of thin films are needed urgently for the development of the next-generation of high-frequency and/or wide-band RF filters or tuneable frequency filters adapted to the fifth generation of infrastructures/networks/communications. The integration of LiNbO 3 films in guided nanophotonic devices will allow higher operational frequencies, wider bandwidth, and miniaturized optical devices in line with improved electronic conversion. Here, the challenges and the achievements in the epitaxial growth of LiTaO 3 and LiNbO 3 thin films and their integration with silicon technology and to acoustic and guided nanophotonic devices are discussed in detail. The systematic representation and classification of all epitaxial relationships reported in the literature have been carried out in order to help the prediction of the epitaxial orientations in the new heterostructures. Future prospects of potential applications and the expected performances of thin film devices are overviewed, as well.Figure 2. Schematic representation of the layer transfer process by the ion slicing technique consisting of a) ion implantation, b) wafer bonding, c) laser irradiation or heating in order to obtain d) a single crystalline layer on the host (Si) substrate. Reproduced with permission. [53]Figure 3. a,b) Electron microscopy images and c) schematic diagram of a microresonator based on LiNbO 3 film on Si and fabricated by the layer transfer technique. Reproduced with permission. [53]The first reports on the growth of c-axis-oriented LN films by liquid phase epitaxy on an LT substrate and by RF sputtering Adv. Mater. Interfaces 2017, 4, 1600998 www.advmatinterfaces.de www.advancedsciencenews.com Figure 6. Frequency response of a) HBAR and b) FBAR based on thinned X-cut LiNbO 3 layer on Si. Schematic representations of a) HBAR and b) FBAR structures are given in the insets. Reproduced with permission. [78]

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“…The mean free path is short so a part of the Li atoms diffuses strongly towards the walls of the deposition chamber by scattering among the gas mixture, instead of being transferred to the substrate. Deposition of nonstoichiometric lithium niobate films is frequently reported in the literature [9,18], and consequently the Li deficiency may be prevented by keeping a low substrate temperature during the process. Moreover, a careful combination of the sputtering parameters, such as gas pressure and gas flow, radio frequency power, etc.…”

Section: Structural Properties Of Linbo 3 /Ncd/si Layersmentioning

confidence: 99%

Structural, electrical and piezoelectric properties of LiNbO3 thin films for surface acoustic wave resonators applications

Edon

Rémiens

Saada

2009

Applied Surface Science

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Epitaxial growth of lithium niobate film using metalorganic chemical vapor deposition

Cited by 39 publications

References 17 publications

The structure and optical properties of Lithium Niobate grown on quartz for photonics application

The structure and optical properties of Lithium Niobate grown on quartz for photonics application

Toward High‐Quality Epitaxial LiNbO₃ and LiTaO₃ Thin Films for Acoustic and Optical Applications

Structural, electrical and piezoelectric properties of LiNbO3 thin films for surface acoustic wave resonators applications

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Epitaxial growth of lithium niobate film using metalorganic chemical vapor deposition

Cited by 39 publications

References 17 publications

The structure and optical properties of Lithium Niobate grown on quartz for photonics application

The structure and optical properties of Lithium Niobate grown on quartz for photonics application

Toward High‐Quality Epitaxial LiNbO3 and LiTaO3 Thin Films for Acoustic and Optical Applications

Structural, electrical and piezoelectric properties of LiNbO3 thin films for surface acoustic wave resonators applications

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Toward High‐Quality Epitaxial LiNbO₃ and LiTaO₃ Thin Films for Acoustic and Optical Applications