Abstract:Hexagonal BN (h-BN) is graphite-like sp 2 -bonded crystal phase, which is the most stable among crystalline BN phases, and has a potential for optical device applications in the deep ultraviolet spectral region. Crystalline phase of BN film grown on a foreign substrate is turbostratic BN (t-BN) or mixed phase with t-BN, h-BN and cubic BN due to the large lattice mismatch and its various crystalline BN phases. Therefore, control of the crystalline phase in the BN film is challenging for single-phase BN growth. … Show more
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