Epitaxial growth of GaInAsP system on wafer-bonded InP/Si substrate

Matsumoto, Keīichi; Kanaya, Yugo; Kishikawa, Junya; Shimomura, Koichiro

doi:10.1109/ltb-3d.2014.6886160

2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) 2014

DOI: 10.1109/ltb-3d.2014.6886160

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Epitaxial growth of GaInAsP system on wafer-bonded InP/Si substrate

Keīichi Matsumoto

Yugo Kanaya

Junya Kishikawa

et al.

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Epitaxial growth of GaInAsP system on wafer-bonded InP/Si substrate

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