“…), microstructural defects, grain sizes and deposition process. By the past, to deposit ceria thin films on substrates, various deposition techniques were extensively used: the RF reactive sputtering [17,18], the chemical vapor deposition [19], the pulsed laser deposition [20,21] and the ''sol-gel'' method for the spin coating deposition [22,23]. Thermochromic VO 2 thin films were deposited on various substrates making use similar approaches: the RF reactive sputtering [24,25], the pulsed laser deposition [26,27], the chemical vapor deposition [28][29][30] and the sol-gel process [31,32].…”