2007
DOI: 10.1016/j.tsf.2007.04.046
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Epitaxial growth and surface morphology of aluminum films deposited on mica studied by transmission electron microscopy and atomic force microscopy

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Cited by 22 publications
(21 citation statements)
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“…The root-mean-square roughness (Rms) of a 1 × 1 μm area of atomically-smooth Al films was 0.47 ± 0.17 nm. 35 The oxygen-dc glow discharge had no effect on the surface smoothness of the Al films.…”
Section: Sample Preparationmentioning
confidence: 94%
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“…The root-mean-square roughness (Rms) of a 1 × 1 μm area of atomically-smooth Al films was 0.47 ± 0.17 nm. 35 The oxygen-dc glow discharge had no effect on the surface smoothness of the Al films.…”
Section: Sample Preparationmentioning
confidence: 94%
“…[28][29][30][31][32][33][34][35] The deposition was conducted in a metal bell-jar evaporator equipped with a liquid-nitrogentrapped 6 in. diffusion-pump.…”
Section: Sample Preparationmentioning
confidence: 99%
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