2000
DOI: 10.1007/bf03028100
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Epitaxial deposition of NiO film on a cube-textured Ni substrate by metal-organic chemical vapor deposition

Abstract: NiO films have been epitaxially grown by metal-organic chemical vapor deposition (MOCVD) on a bi-axially textured Ni substrate using Ni(thd): as a precursor. The NiO film was deposited at 470~ for 10 min at a deposition pressure of 10 Torr and oxygen partial pressure of 0.91Torr. SEM and AFM observations for the deposited NiO film showed a smooth and dense morphology. X-ray rocking curve and tlJ-scan showed that the NiO film has a bi-axial texture with a (100)<031> orientation. The out-of-plane and the in-plan… Show more

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Cited by 3 publications
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“…substrate may favor NiO formation and subsequently hydrated, overlying Ni(OH) 2 . 25,[101][102][103] Later during passivation, enrichment was said to be driven by thermodynamic factors. 103,104 However, early stages of oxidation appear to favor Cr 1-x Ni x O 1.5-x/2 instead of stoichiometric oxides.…”
Section: Factors Governing the Chemical Identity And Compositionmentioning
confidence: 99%
“…substrate may favor NiO formation and subsequently hydrated, overlying Ni(OH) 2 . 25,[101][102][103] Later during passivation, enrichment was said to be driven by thermodynamic factors. 103,104 However, early stages of oxidation appear to favor Cr 1-x Ni x O 1.5-x/2 instead of stoichiometric oxides.…”
Section: Factors Governing the Chemical Identity And Compositionmentioning
confidence: 99%