Much effort has been devoted to understand how chromatin modification regulates development and disease. Despite recent progress, however, it remains difficult to achieve high sensitivity and reliability of chromatin-immunoprecipitation-coupled deep sequencing (ChIP-seq) to map the epigenome and global transcription factor binding sites in cell populations of low cell abundance. We present a new Atlantis dsDNase-based technology, aFARP-ChIP-seq, that provides accurate profiling of genome-wide histone modifications in as few as 100 cells. By mapping histone lysine trimethylation (H3K4me3) and H3K27Ac in group I innate lymphoid cells from different tissues, aFARP-ChIP-seq uncovers potentially distinct active promoter and enhancer landscapes of several tissue-specific NK and ILC1. aFARP-ChIP-seq is also highly effective in mapping transcription factor binding sites in small number of cells.Since aFARP-ChIP-seq offers reproducible DNA fragmentation, it should allow multiplexing ChIP-seq of both histone modifications and transcription factor binding sites for low cell samples.Chromatin immunoprecipitation coupled with deep sequencing (ChIP-seq) is a powerful technique for genome-wide mapping of the binding of chromatin regulators and epigenetic modifications, which has contributed greatly to both basic and translational research (Park, 2009;Furey, 2012). For example, the accurate mapping of epigenome changes in cell populations at distinct developmental stages facilitate our understanding of epigenetic mechanisms by which different cell lineages establish their unique transcriptional programs. Unfortunately, two major limitations restrict the utility of conventional ChIP-seq method in studying rare cell types isolated directly from tissues. The first is fragmentation. Although sonication is the most commonly used approach for chromatin fragmentation in ChIP-seq, it can result in epitope damage and thus reducing the immunoprecipitation efficiency especially when the initial material is limited (Stathopulos et al., 2004). The inconsistencies in sonication-based chromatin fragmentation results in a low-throughput processing of samples because each sample needs to be tested for specific setting of sonication power and time. This impedes its adaptation for reliably processing of multiple samples. Although micrococcal nuclease (MNase) has been used as an alternative to sonication for chromatin fragmentation, MNase often causes chromatin over-digestion (Brind'Amour et al., 2015). Another difficulty is chromatin loss during multiple steps of ChIP-seq operation, which makes it difficult to obtain high-quality mapping in a small number of cells (Park, 2009).