Environmental Impact Assessment of Chemical Mechanical Planarization Consumables: Challenges, Future Needs, and Perspectives
Ravitej Venkataswamy,
Lyle Trimble,
Andrew McDonald
et al.
Abstract:This paper provides a detailed overview of the environmental impacts and sustainability of chemical mechanical planarization (CMP) consumable manufacturing in the semiconductor industry, especially in the context of rising global demand for semiconductors. It addresses the significant environmental challenges faced by the industry, particularly in terms of energy, water, and material consumption. A thorough examination of the manufacturing processes for key CMP consumables, such as slurries, pads, brushes, cle… Show more
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