2008
DOI: 10.1016/j.jhazmat.2008.02.023
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Environmental and health risk analysis of nitrogen trifluoride (NF3), a toxic and potent greenhouse gas

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Cited by 65 publications
(27 citation statements)
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“…32 Finally, nitrogen trifluoride (NF 3 ) is the latest member of the GHG-club. In 2008, several studies appeared calling attention to the RF of climate due to this previously unappreciated compound (Prather and Hsu 2008;Tsai 2008). As noted above, NF 3 was added to the Kyoto Protocol list of GHGs as part of the Doha amendment in 2012.…”
Section: Hfcs Pfcs Sf 6 and Nfmentioning
confidence: 99%
“…32 Finally, nitrogen trifluoride (NF 3 ) is the latest member of the GHG-club. In 2008, several studies appeared calling attention to the RF of climate due to this previously unappreciated compound (Prather and Hsu 2008;Tsai 2008). As noted above, NF 3 was added to the Kyoto Protocol list of GHGs as part of the Doha amendment in 2012.…”
Section: Hfcs Pfcs Sf 6 and Nfmentioning
confidence: 99%
“…This method calculates the emissions based on "industry-wide default values for the fraction of the purchased gas remaining in the shipping container after use" (Tsai 2007) and additional factors. The Tier 2a method was used because the default values were estimated based on previous studies, providing a quantitative basis for determining the amount of NF 3 released to the atmosphere.…”
Section: Cradle-to-gate Stage (Upstream Processes)mentioning
confidence: 99%
“…Prior to the mid1990s, perfluorocompounds such as tetrafluoromethane (CF 4 ), hexafluoroethane (C 2 F 6 ), and sulfur hexafluoride (SF 6 ) were used in these process chambers; however, with the signing of the Kyoto protocol in 1997 these gases became regulated. As a result, several specialty gases were used as replacements to the perfluorocompounds (Tsai 2007). NF 3 gained popularity as a gas that was meant to reduce global warming.…”
Section: Introductionmentioning
confidence: 99%
“…At one time it was considered for use as a rocket propellant. In the mid 1990s, NF 3 replaced perfluorocarbons compounds such as tetrafluoromethane (CF 4 ), hexafluoroethane (C 2 F 6 ), and sulfur hexafluoride as the silicon-etching and CVD reactor-cleaning agents for the electronics industry to reach Kyoto Protocol goals for reducing these gases (Tsai 2008) because it was considered to be an environmentally benign material. Recent evaluations (Prather and Hsu 2008;Tsai 2008) identify NF 3 as a potential significant long-lived "greenhouse" gas.…”
Section: Nf 3 Backgroundmentioning
confidence: 99%
“…Barbier et al (2010) provide a GWP of 10,800 for NF 3 . Tsai (2008) estimates that the total NF 3 releases from the electronics industry of 3.6 to 56 metric tonnes per year based on their measurement of NF 3 in the atmosphere. Weiss et al (2008) estimate the annual release at 620 metric tonnes or 16% of the estimated 4000 metric tonnes produced annually.…”
Section: Nf 3 Environmental Concernsmentioning
confidence: 99%