Enhancing the Sensitivity of GaN High Electron-Mobility Transistors-Based pH Sensor by Dual Function of Monolithic Integrated Planar Multi-Channel and Ultraviolet Light

Yang, Xiaojun; Ao, Jiapei; Wu, Shiwei; Hu, Long; Li, Xin; Liu, Weihua; Wang, Xiaoli; Han, Chuanyu

doi:10.1109/ted.2021.3123263

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“…This can be attributed to enhanced transconductance and improvement in potential sensitivity due to combined use of recess to decrease 2DEG channel to surface distance and NH4OH treatment to improve surface condition, respectively [146]. conventional design [147]. This improvement can be attributed to the increase in sensing area and effective channel resistance decrease for parallel multi-channel design.…”

Section: Ph Sensorsmentioning

confidence: 99%

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Section: Ph Sensorsmentioning

confidence: 99%

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Improved Sensitivity and Stability for SnO Ion-Sensitive Field-Effect Transistor-Based pH Sensor by Electrical Double Layer Gate and AlO Sensitive Film

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AlGaN/GaN HEMT Based pH Detection Using Atomic Layer Deposition of Al₂O₃ as Sensing Membrane and Passivation

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Enhancing the Sensitivity of GaN High Electron-Mobility Transistors-Based pH Sensor by Dual Function of Monolithic Integrated Planar Multi-Channel and Ultraviolet Light

Cited by 3 publications

References 41 publications

AlGaN/GaN high electron mobility transistor for various sensing applications: A review

AlGaN/GaN high electron mobility transistor for various sensing applications: A review

Improved Sensitivity and Stability for SnO Ion-Sensitive Field-Effect Transistor-Based pH Sensor by Electrical Double Layer Gate and AlO Sensitive Film

AlGaN/GaN HEMT Based pH Detection Using Atomic Layer Deposition of Al₂O₃ as Sensing Membrane and Passivation

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Enhancing the Sensitivity of GaN High Electron-Mobility Transistors-Based pH Sensor by Dual Function of Monolithic Integrated Planar Multi-Channel and Ultraviolet Light

Cited by 3 publications

References 41 publications

AlGaN/GaN high electron mobility transistor for various sensing applications: A review

AlGaN/GaN high electron mobility transistor for various sensing applications: A review

Improved Sensitivity and Stability for SnO Ion-Sensitive Field-Effect Transistor-Based pH Sensor by Electrical Double Layer Gate and AlO Sensitive Film

AlGaN/GaN HEMT Based pH Detection Using Atomic Layer Deposition of Al2O3 as Sensing Membrane and Passivation

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AlGaN/GaN HEMT Based pH Detection Using Atomic Layer Deposition of Al₂O₃ as Sensing Membrane and Passivation