Enhancing the sensitivity of a micro-diaphragm resonating sensor by effectively positioning the mass on the membrane

Kim, Jinsik; Kim, Hye Jin; Cho, Eun Ae; Shin, Hyun Joon; Park, Jung Ho; Hwang, Kyo Seon

doi:10.1038/srep17069

Cited by 14 publications

(10 citation statements)

References 19 publications

(25 reference statements)

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“…Parameters, such as surface roughness, surface coverage, homogeneity, and reproducibility, have a direct effect on the mechanical transduction in both the static and dynamic operation modes. Several works have demonstrated the effect of surface inhomogeneity and location of the element on the mechanical response of microcantilevers and membranes (Ramos et al, 2007a,b;Chatzandroulis, 2012, 2015;Kim et al, 2015;Minami and Yoshikawa, 2020). Cells or bacteria detected at the microcantilever free-end increase the microcantilever mass, reducing its resonance frequency, while cells close to the clamping region have a larger effect on the resonator spring constant, increasing its resonance (Ramos et al, 2007a;Imamura et al, 2016).…”

Section: Functional Coatingsmentioning

confidence: 99%

Nanomechanical Sensors as a Tool for Bacteria Detection and Antibiotic Susceptibility Testing

2020

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Nanomechanical biosensors refer to a subfamily of micro-electromechanical systems (MEMS) consisting of movable suspended microstructures able to convert biological processes into measurable mechanical motion. Owing to this, nanomechanical biosensors have become a promising technology in the way to detect and manage bacterial pathogens with improved effectiveness. The precise treatment of an infection relies on its early diagnosis; however, the current standard culture-based methods for bacteria detection and antibiotic susceptibility testing involve long protocols and are labor intensive. Thanks to its high sensitivity, fast response, and high throughput capability, nanomechanical technology holds great potential for overcoming some of the limitations of conventional methods. This review aims to provide a perspective on the diverse transducer structures, working principles, and detection strategies of nanomechanical sensors for bacteria detection and antibiotic susceptibility testing. Their performance in terms of sensitivity and operation time is compared with standard methods currently used in clinical microbiology laboratories. In addition, commercial systems already developed and challenges in the way of reaching real sensing application beyond the research environment are discussed.

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Section: Functional Coatingsmentioning

confidence: 99%

Nanomechanical Sensors as a Tool for Bacteria Detection and Antibiotic Susceptibility Testing

2020

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“…Here σ is the biaxial stress, ρ is the film density, l x and l y are its lateral dimensions, n & m represent the mode number, β = ρ air l/ρt is the thickness correction factor, ρ air is the density of air, t is the membrane thickness, and is the non-dimensional added virtual mass incremental (NAVMI) factor, which is determined by boundary conditions and mode shape [26]- [29]. The resonance frequency is proportional to the square root of the residual stress; therefore as stress changes, so will the frequency.…”

Section: Residual Stress and Temperaturementioning

confidence: 99%

Ultrasonic Inspection and Self-Healing of Ge and 3C-SiC Semiconductor Membranes

Zhou

Colston

Myronov

et al. 2020

J. Microelectromech. Syst.

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Knowledge of the mechanical properties and stability of thin film structures is important for device operation. Potential failures related to crack initiation and growth must be identified early, to enable healing through e.g. annealing. Here, three square suspended membranes, formed from a thin layer of cubic silicon carbide (3C-SiC) or germanium (Ge) on a silicon substrate, were characterised by their response to ultrasonic excitation. The resonant frequencies and mode shapes were measured during thermal cycling over a temperature range of 20-100 • C. The influence of temperature on the stress was explored by comparison with predictions from a model of thermal expansion of the combined membrane and substrate. For an ideal, non-cracked sample the stress and Q-factor behaved as predicted. In contrast, for a 3C-SiC and a Ge membrane that had undergone vibration and thermal cycling to simulate extended use, measurements of the stress and Q-factor showed the presence of damage, with the 3C-SiC membrane subsequently breaking. However, the damaged Ge sample showed an improvement to the resonant behaviour on subsequent heating. Scanning electron microscopy showed that this was due to a self-healing of sub-micrometer cracks, caused by expansion of the germanium layer to form bridges over the cracked regions, with the effect also observable in the ultrasonic inspection. [2020-0017] Index Terms-Laser ultrasound, vibration, microelectromechanical systems (MEMS), thin films. I. INTRODUCTION S OLID thin films are used in a wide variety of engineering systems, including development of micro-electromechanical systems (MEMS) and nano-electro-mechanical systems (NEMS) [1]-[4]. The suspended square thin film is a simple MEMS structure and can be used in pressure sensors, or as a platform for integrating devices for applications such as near-infrared photo-detectors, flow sensors, photonic modulators, lasers, and enhancing silicon light emission via carrier injection [5]-[10]. The use of tensile strained membranes, such as Germanium (Ge) on Silicon (Si), can change the electronic or optoelectronic properties by reducing the energy band gap [11], [12]. However, the residual stress in thin films, especially within a multilayer structure, is temperature dependent. Changes in temperature can induce mechanical Manuscript

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“…In recent years, gas sensors have received much attention because of serious environmental pollution caused by the rapid development of modern industry [1,2,3,4,5,6]. As with most types of other sensors, gas sensors should also have high sensitivity and short response time, good long-term stability, and low operating voltage.…”

Section: Introductionmentioning

confidence: 99%

Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar

Feng

Dai

et al. 2016

Sensors

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Here, a silicon nanopillar array (Si-NPA) was fabricated. It was studied as a room-temperature organic vapour sensor, and the ethanol and acetone gas sensing properties were detected with I-V curves. I-V curves show that these Si-NPA gas sensors are sensitive to ethanol and acetone organic vapours. The turn-on threshold voltage is about 0.5 V and the operating voltage is 3 V. With 1% ethanol gas vapour, the response time is 5 s, and the recovery time is 15 s. Furthermore, an evaluation of the gas sensor stability for Si-NPA was performed. The gas stability results are acceptable for practical detections. These excellent sensing characteristics can mainly be attributed to the change of the overall dielectric constant of Si-NPA caused by the physisorption of gas molecules on the pillars, and the filling of the gas vapour in the voids.

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Enhancing the sensitivity of a micro-diaphragm resonating sensor by effectively positioning the mass on the membrane

Cited by 14 publications

References 19 publications

Nanomechanical Sensors as a Tool for Bacteria Detection and Antibiotic Susceptibility Testing

Nanomechanical Sensors as a Tool for Bacteria Detection and Antibiotic Susceptibility Testing

Ultrasonic Inspection and Self-Healing of Ge and 3C-SiC Semiconductor Membranes

Organic Vapour Sensing Properties of Area-Ordered and Size-Controlled Silicon Nanopillar

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