The high-aspect-ratio elements are widely employed for chemical sensors, microfluidics and medical imaging devices. To enhance the competitiveness in the market of elements with high-aspect-ratio microstructures, a cost-effective method for fabricating molds with high-aspect-ratio microstructures was proposed. In order to manufacture the second rubber mold, low-temperature plasma were used to change the surface characteristics of the rubber mold to avoid using the release agents in the manufacturing process. It was found that the aluminum (Al)-filled epoxy resin mold with the aspect ratio of 20 : 1 can be carried out in about three days. Replication rates of a precision rapid tooling with high-aspect-ratio micro-sized features around 97 % can be obtained. The total fabrication cost savings for fabricating a SU-8 microelement with the aspect ratio of 20 : 1 about 71 % can be obtained.