Enhancing the Crystallization and Properties of the SrRuO3 Electrode Film Grown by Atomic-Layer-Deposited SrO and Pulsed-Chemical Vapor-Deposited RuO2 through Al Substitution
Abstract:SrRuO 3 (SRO) is a promising electrode material for the next-generation dynamic random access memory (DRAM) capacitor. This study focuses on the properties of SRO electrode films grown by combining the atomic-layer deposition of SrO and pulsed-chemical vapor deposition of RuO 2 component layers using Sr( i Pr 3 Cp) 2 ( i Pr 3 Cp = 1,2,4-trisisopropyl-cyclopentadienyl) and RuO 4 precursors, respectively. Changes in the Ru concentration and electrical properties of SRO electrode films during postdeposition annea… Show more
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