Enhancing phosphorous doping level on Ge by Sb co-doping with non-beamline implantation methods

Enhanced high-temperature volume resistivity of AlN by doping

“…[8][9][10][11][12] Recently, electrostatic chucks are expected to be used under high temperature condition, for the deposition techniques such as PVD and ALD methods. [13][14][15][16][17] However, it is known that the carrier density of ceramics generally increases exponentially with increasing temperature, and the volume resistivity decreases accordingly. As a result, the electrostatic force at high temperatures decreases, making it difficult to adsorb and fix the material.…”