Enhancing Manufacturability of SU-8 Piezoelectric Composite Films for Microsystem Applications
Irma Rocio Vazquez,
Zeynel Guler,
Nathan Jackson
Abstract:Piezoelectric thin films are extensively used as sensing or actuating layers in various micro-electromechanical systems (MEMS) applications. However, most piezoelectrics are stiff ceramics, and current polymer piezoelectrics are not compatible with microfabrication due to their low Curie Temperature. Recent polymer-composite piezoelectrics have gained interest but can be difficult to pattern. Photodefinable piezoelectric films could resolve these challenges by reducing the manufacturability steps by eliminatin… Show more
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