Enhancing amplitude changes by mode localization in trio cantilevers with mass perturbation

Abstract

A simplified three-cantilever array was designed and micro-fabricated for demonstrating the response enhancement in amplitude changes when applying small mass perturbations. Three micro-cantilevers, defined as side (outermost) cantilever, center cantilever and another side cantilever, are identical in geometry and are connected micro-mechanically with each other by two coupling overhangs. In the case of analytical characterizations, by applying a picogram order mass perturbation (10 pg) on one side cantilever, significant enhancements in amplitude changes were obtained at the 2nd resonance mode from both of the unloaded cantilevers. The amplitude change from the center cantilever is about 7000 times higher than that with no mass perturbation, while the change in amplitude from another side cantilever is about 4000 times higher. In the aspect of experimental characterizations, the enhancement in amplitude change at the 2nd resonance mode was verified by applying two polystyrene micro-spheres (about 8.8 pg) as a picogram order mass perturbation onto one side cantilever. Due to the operational difficulties in quantitatively manipulating polystyrene micro-spheres, the effects of mass variations on the enhancement in amplitude changes from unloaded cantilevers were further analytically characterized under a range of 0.01-100 pg for three resonance modes respectively. This work is the first comparative study using three identical spring-mass beams on both analytical characterizations by applying small mass perturbations and sensing verification by manipulating a picogram polystyrene micro-sphere.

Enhancing the linear dynamic range of a mode-localized MEMS mass sensor with repulsive electrostatic actuation

“…It also concerns other applications like energy harvesting [5,6]. For MEMS sensors, the authors often investigate the number of coupled resonators [7][8][9], and the use of other kind of resonators and coupling [10,11]. Recently, the coupling between resonators of different physical nature has been proposed [12,13].…”

Functionalization of electrostatic nonlinearities to overcome mode aliasing limitations in the sensitivity of mass microsensors based on energy localization

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