Enhancements of extreme ultraviolet emission using prepulsed Sn laser-produced plasmas for advanced lithography applications

Freeman, J. R.; Harilal, S. S.; Hassanein, A.

doi:10.1063/1.3647779

Cited by 45 publications

(29 citation statements)

References 25 publications

(34 reference statements)

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“…Some of the key applications are pulsed laser deposition (PLD), 1 nanoparticle, nanostructure and cluster formation, 2,3 laser induced breakdown spectroscopy (LIBS), 4,5 LA inductively coupled plasma mass spectrometry (LA-ICP-MS) 6 and light sources for lithography, 7 and microscopy. 8 Understanding plasma plume dynamics is important for optimizing LPPs for all of these applications.…”

Section: Introductionmentioning

confidence: 99%

Expansion dynamics of ultrafast laser produced plasmas in the presence of ambient argon

et al. 2014

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We investigated the expansion dynamics of fs laser ablated brass plasma in Ar at various pressure levels ranging from 10−5 Torr to atmospheric conditions using time-resolved and spectrally resolved two-dimensional imaging. Significant changes in plume morphology were noticed at varying pressure levels which included free expansion, spherical to cylindrical geometry changes, sharpening, and confinement. The temporal evolution of excited Cu and Zn species in the plume were imaged using narrow band-pass interference filters, and their hydrodynamic expansion features were compared. 2D imaging coupled with monochromatic line selection showed velocity differences, uneven distribution, and aspect ratio differences among the plume species. Plume morphological changes were found to be significant at intermediate pressure levels (∼10 Torr) where plasma emissivity was found to be maximum. The expansion features of plume were compared with various models and found to be generally in good agreement.

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Section: Introductionmentioning

confidence: 99%

Expansion dynamics of ultrafast laser produced plasmas in the presence of ambient argon

et al. 2014

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“…Laser ablation (LA) and plasma generation already have numerous applications. These include narrowband short wavelength light sources for lithography 1 and microscopy, 2 broadband sources for spectroscopy, 3 analytical applications ranging from laser-induced breakdown spectroscopy (LIBS), 4 LA inductively coupled plasma mass-spectrometry (LA-ICP-MS) 5 to matrix-assisted laser desorption/ionization (MALDI), 6 micromachining, 7 pulsed laser deposition (PLD), 8 nanoparticle production, 9 laser ion source (LIS), 10 etc. In light source applications, pulsed, high intensity lasers are used to heat and vaporize the material of interest in vacuum.…”

Section: Introductionmentioning

confidence: 99%

Experimental and computational study of complex shockwave dynamics in laser ablation plumes in argon atmosphere

et al. 2012

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We investigated spatio-temporal evolution of ns laser ablation plumes at atmospheric pressure, a favored condition for laser-induced breakdown spectroscopy and laser-ablation inductively coupled plasma mass-spectrometry. The 1064 nm, 6 ns pulses from a Nd:YAG laser were focused on to an Al target and the generated plasma was allowed to expand in 1 atm Ar. The hydrodynamic expansion features were studied using focused shadowgraphy and gated 2 ns self-emission visible imaging. Shadowgram images showed material ejection and generation of shock fronts. A secondary shock is observed behind the primary shock during the time window of 100-500 ns with instabilities near the laser cone angle. By comparing the self-emission images obtained using fast photography, it is concluded that the secondary shocks observed in the shadowgraphy were generated by fast moving target material. The plume front estimates using fast photography exhibited reasonable agreement with data obtained from shadowgraphy at early times ≤400 ns. However, at later times, fast photography images showed plume confinement while the shadowgraphic images showed propagation of the plume front even at greater times. The structure and dynamics of the plume obtained from optical diagnostic tools were compared to numerical simulations. We have shown that the main features of plume expansion in ambient Ar observed in the experiments can be reproduced using a continuum hydrodynamics model which provided valuable insight into the expansion dynamics and shock structure of the plasma plume.

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“…INTRODUCTION X-ray emissions from laser-produced plasmas have attracted strong interests in the past decades due to their extensive applications in many fields, such as XUV(extreme ultra violet)-soft x-ray lasers, 1 advanced lithography, 2 x-ray backlighting, 3,4 inertial confinement fusion (ICF), 5,6 etc. In these applications, the most desirable objective is to maximize the x-ray radiation intensity by choosing proper laser and target parameters.…”

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confidence: 99%

Enhanced x-ray emissions from Au-Gd mixture targets ablated by a high-power nanosecond laser

Dong

Shang

Yang

et al. 2014

Journal of Applied Physics

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As an important x-ray source, enhancement of x-ray emissions from laser-produced plasmas is imperative for various applications. High-Z Au-Gd mixture targets are proposed to enhance the laser to x-ray conversion efficiency compared to pure Au target. In the experiments, a 1 ns frequency-tripled (351 nm wavelength) laser light was used to obtain an intensity of 3×1014 W/cm2 on the targets. The x-ray spectra, total absolute x-ray emissions of all space, M-band fraction and backscattering from pure Au and Au-Gd mixture have been measured, respectively. It is shown that the absolute laser to x-ray conversion efficiency for the Au-Gd mixture containing 60% gold by atom is 47.7%, which has a 15% enhancement compared with that of the pure Au target. The experimental results are consistent with the radiation hydrodynamic simulations.

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Enhancements of extreme ultraviolet emission using prepulsed Sn laser-produced plasmas for advanced lithography applications

Cited by 45 publications

References 25 publications

Expansion dynamics of ultrafast laser produced plasmas in the presence of ambient argon

Expansion dynamics of ultrafast laser produced plasmas in the presence of ambient argon

Experimental and computational study of complex shockwave dynamics in laser ablation plumes in argon atmosphere

Enhanced x-ray emissions from Au-Gd mixture targets ablated by a high-power nanosecond laser

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