2012
DOI: 10.1016/j.micron.2011.11.004
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Enhancements in specimen preparation of Cu(In,Ga)(S,Se)2 thin films

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Cited by 18 publications
(17 citation statements)
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“…TEM lamellae have been prepared using a FEI Strata DB235 equipped with a Ga‐based focused ion beam, using the in situ lift‐out method . To limit the formation of Cu‐rich precipitates on the surface of the lamellae by the ion milling, XeF2 was used during the final 5‐kV polishing step . The relative thickness of the lamella was maintained between t/λ = 0.15–0.5.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…TEM lamellae have been prepared using a FEI Strata DB235 equipped with a Ga‐based focused ion beam, using the in situ lift‐out method . To limit the formation of Cu‐rich precipitates on the surface of the lamellae by the ion milling, XeF2 was used during the final 5‐kV polishing step . The relative thickness of the lamella was maintained between t/λ = 0.15–0.5.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…15 Thus, we used XeF 2 as reactive gas during the last step of milling to avoid the creation of such agglomerates. 16 No agglomerates have been observed on the final lamellas, as it can be clearly seen in the scanning electron microscopy (SEM) image in Figure 1.…”
mentioning
confidence: 90%
“…During acquisition of depth profiles, all investigated samples, including the crystals for calibration, were cooled with liquid nitrogen to minimize migration and clustering of surface atoms. Sputtering of CIGS layers without cooling causes a roughening of the sputtered surface and results in a decreased depth resolution and distortion of the depth profiles …”
Section: Methodsmentioning
confidence: 99%
“…Sputtering of CIGS layers without cooling causes a roughening of the sputtered surface and results in a decreased depth resolution and distortion of the depth profiles. [22,23] Results and discussion [8] Nakada reported that CBD Zn(O,S) grown on CIGS exhibits small polycrystalline grains containing a large number of defects. [24] In contrast, sputtered Zn(O,S) layers yielding best efficiencies show a high degree of crystallinity, as found by several groups.…”
Section: Methodsmentioning
confidence: 99%