Enhancement of the reliability of MEMS shock sensors by adopting a dual-mass model

Fathalilou, Mohammad; Soltani, Kamran; Rezazadeh, Ghader; Ciğeroğlu, Ender

doi:10.1016/j.measurement.2019.107428

Cited by 10 publications

(6 citation statements)

References 21 publications

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“…In regard to system-level structure design, Mohammad Fathalilou et al proposed a dual-mass MEMS shock sensor (switch) that improve the safety performance of the sensor under below-threshold shocks by adjusting the auxiliary system, namely by attaching an auxiliary mass-spring to the main structure [ 57 ]. Danmeng Wang devised a Trap-and-Hold (TAH) additional structure to effectively restrict the motion of the mass when subjected to a shock, thereby enhancing the shock resistance of the dual-mass gyroscope [ 58 ].…”

Section: Mems Reliability With Consideration Of Shockmentioning

confidence: 99%

See 1 more Smart Citation

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

Xu,

Liu,

et al. 2024

Heliyon

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Section: Mems Reliability With Consideration Of Shockmentioning

confidence: 99%

“… 2022 [ 61 ] A MEMS dual-mass shock sensor with higher reliability The interval between the designed threshold and the minimum shock has been decreased up to 45%. 2020 [ 57 ] …”

Section: Mems Reliability With Consideration Of Shockmentioning

confidence: 99%

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

Xu,

Liu,

et al. 2024

Heliyon

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“…These traditional single-mass inertial switches may misoperate at shock levels less than the threshold, resulting in reduced switch reliability. Fathalilou et al [ 37 ] proposed a dual-mass MEMS shock switch. An auxiliary mass spring was attached to the main mechanism of the switch, and the safety performance of the sensor under shocks below the threshold was improved by adjusting the auxiliary system.…”

Section: Intermittent Inertial Switchesmentioning

confidence: 99%

Research Progress of MEMS Inertial Switches

Liu

Niu

et al. 2022

Micromachines

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As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial switch is provided. Different MEMS inertial switch studies were reviewed that emphasized acceleration directional and threshold sensitivity, contact characteristics, and their superiorities and disadvantages. Furthermore, the specific fabrication methods offer an applicability reference for the preparation process for the designed inertial switch, including non-silicon surface micromachining technology, standard silicon micromachining technology, and the special fabrication method for the liquid inertial switch. At the end, the main conclusions of the current challenges and prospects about MEMS inertial switches are drawn to assist with the development of research in the field of future engineering applications.

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“…The most representative of these is the optimized design of the dual-mass coupled gyroscope. In 2014, J Zhou [93] proposed a lever coupling mechanism in a dual-mass gyroscope, which increased the shock resistance in the driving direction to more than 10,000 g. Y Gao and M Fathalilou [94,95] also proposed a mechanical structure resistant to high-g shocks based on the dual-mass model in 2017 and 2020, respectively (as shown in Figure 10). These studies showed that the dual-mass model could significantly improve the impact resistance of the driving direction without sacrificing structural sensitivity.…”

Section: Specific Anti-shock Structuresmentioning

confidence: 99%

Reliability of MEMS in Shock Environments: 2000–2020

Peng

You

2021

Micromachines

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The reliability of MEMS in shock environments is a complex area which involves structural dynamics, fracture mechanics, and system reliability theory etc. With growth in the use of MEMS in automotive, IoT, aerospace and other harsh environments, there is a need for an in-depth understanding of the reliability of MEMS in shock environments. Despite the contributions of many articles that have overviewed the reliability of MEMS panoramically, a review paper that specifically focuses on the reliability research of MEMS in shock environments is, to date, absent. This paper reviews studies which examine the reliability of MEMS in shock environments from 2000 to 2020 in six sub-areas, which are: (i) response model of microstructure, (ii) shock experimental progresses, (iii) shock resistant microstructures, (iv) reliability quantification models of microstructure, (v) electronics-system-level reliability, and (vi) the coupling phenomenon of shock with other factors. This paper fills the gap around overviews of MEMS reliability in shock environments. Through the framework of these six sub-areas, we propose some directions potentially worthy of attention for future research.

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Enhancement of the reliability of MEMS shock sensors by adopting a dual-mass model

Cited by 10 publications

References 21 publications

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

Research Progress of MEMS Inertial Switches

Reliability of MEMS in Shock Environments: 2000–2020

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