Enhancement of the electrophotographic properties of DLC coated OPC drums by oxygen addition

2013

KEM

In this study, we investigated DLC-Si films were deposited by PECVD from C4H10:SiH4:O2 gas mixtures. We aim to investigate the influence of hydrogen on the variation of echanical properties and microstructure of DLC-Si films synthesized by radio frequency plasma chemical vapor deposition (r.f.-PECVD). The DLC films were deposited on a silicon substrate. That the reactant gases employed in this paper are a mixture of composition. The films deposited were studied by atomic force microscope (AFM), Raman and Fourier transform infrared (FT-IR) spectroscopy. The test results show that the ratio of SiH4 in the gas mixture was successively varied to clarify its influence on the roughness, microstructure, hardness, refractive index for the DLC films. The results reveal that the increasing of the concentration of SiH4 increases sp3 ratio, refractive index and roughness. Meanwhile, increasing the SiH4 concentration causes the decrease of hardness. Finally, optic behavior is correlated to the silicon concentration for deposition with SiH4 containing reactant gas.

Section: Introductionmentioning

confidence: 99%

Study on Deposition of Amorphous DLC-Si Films by RF-PECVD

2013

KEM

“…Silicon-incorporated diamond-like carbon (DLC-Si) films have also a great potential for technological applications [4][5][6][7] , since it may present reduced residual internal stress, high deposition rates, high hardness and good adhesion to many substrates [8][9] .…”

Section: Introductionmentioning

confidence: 99%

Characterization of DLC-Si films prepared by RF-PECVD

2012 International Conference on Optoelectronics and Microelectronics

2012

Silicon-doped diamond-like carbon (DLC) films with a Si content from 6.30% to 19.73% were grown on Si substrate by radio frequency plasma-enhanced chemical vapour deposition (RF-PECVD). The influence of Si addition on the bonding structure, nanomechanical behaviour of the DLC films was investigated by Raman and X-ray photoelectron (XPS) spectroscopy, and Fourier transform infrared (FT-IR) spectroscopy. Silicon addition promoted the formation of sp3 bonding and reduced the hardness. The results show that the ratio of SiH 4 in the gas mixture was successively varied to clarify its influence on the microstructure for the DLC films.

“…Even ZnS (n=2.2) was used on the outer germanium surface but this rapidly deteriorated when exposed to the atmosphere. But DLC film can solve this problem [9][10] . In this study, we report the effects of different microwave frequency, mix gas inverse proportion and thickness on chemical, optical, bonding and structural properties of DLC thin films grown by PECVD.We aims to research the influence of hydrogen on the variation of mechanical properties and microstructure of diamond-like carbon (DLC) films synthesized by radio frequency plasma chemical vapor deposition (RF-PECVD).…”

Section: Introductionmentioning

confidence: 99%

Study on deposition of amorphous hydrogenate DLC films on germanium substrates by RF-PECVD

Liu

4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technolo

et al. 2009

This paper aims to research the influence of hydrogen on the variation of mechanical properties and microstructure of diamond-like carbon (DLC) films synthesized by radio frequency plasma chemical vapor deposition (RF-PECVD). The DLC films were deposited on germanium substrates as protective layers with butane-hydrogen mixture gas. The films obtained are polycrystalline and texture-growth, the surface of the thin films is grain-like and dispersing incompact. The synthesis and post-plasma etching treatment of DLC films were prepared with low-temperature methods (T<150℃). The reactant gas is a high pure mixture of butane (99.9%) and hydrogen (99.99%). The effect of deposition parameters on the structure and properties of DLC thin films has been studied. DLC films deposited are studied by atomic force microscopy (AFM), Raman, Fourier-transform infrared (FTIR), nanoindentation and nanoscratch. Test results show the transmissivity of deposited DLC films from 8µm and 12µm region is higher than 60% averagely, which closees to theory value firstly. Secondly, with the increase of deposition voltage, the content of sp3C in the DLC thin films increases, the roughness of thin films decreases. Thirdly, with the increase of deposition frequency, the content of sp3C in the DLC thin films increases, the roughness of the thin films decreases. Finally, as the film thickness increases, the ratio of I(D)/I(G) increases and the hardness decreases. This indicates as the film thickness increases, the bonding is towards graphite structure and reducing hardness. The high sp2 fraction and low hardness explain the poor adhesion of large film thickness. The results reveal that increasing the concentration of hydrogen, thickness and roughness decreases.