Abstract:The truncated-conical air-hole (TAH) array structure of an InGaN light-emitting diode (LED) was fabricated on the mesa-edge region to increase the light extraction efficiency. The fabrication consisted of a dry process and a crystallographic wet etching process on the AlN buffer layer to form a truncated-conical air-hole array pattern. The light output power of the TAH-LED structure has a 55% enhancement compared with the conventional LED structure at 20 mA operation current. At 20 mA operation current, the fo… Show more
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