Enhancement of ionized metal flux fraction without compromising deposition rate in industrial magnetron sputtering

Klein, Peter; Hnilica, Jaroslav; Sochora, Vjačeslav; Souček, Pavel; Fekete, Matej; Vašina, Petr

doi:10.1016/j.surfcoat.2024.131142

Surface and Coatings Technology

2024

DOI: 10.1016/j.surfcoat.2024.131142

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Enhancement of ionized metal flux fraction without compromising deposition rate in industrial magnetron sputtering

Peter Klein,

Jaroslav Hnilica,

Vjačeslav Sochora

et al.

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Enhancement of ionized metal flux fraction without compromising deposition rate in industrial magnetron sputtering

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References 46 publications

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