We have investigated superconducting properties and orientation behavior of RE123 (RE = Yb, Er, Sm, Nd and La) films on MgO and SrTiO 3 substrates by metalorganic deposition technique using metal naphthenates. On MgO substrates, only Yb123 films showed superconducting transition with T c(zero) of 77.0 K and c-axis orientation with in-plane alignment. On SrTiO 3 substrates, Yb123, Er123, Sm123, Nd123 and La123 films showed c-axis orientation with in-plane alignment, and T c(zero) of 89.5 K, 89.7 K, 80.5 K, 85.0 K and 47.6 K, respectively. Sm123 and La123 films showed square and plate-like grains on MgO substrates, and relatively flat surface covered with well-grown grains on SrTiO 3 substrates.