p-channel GaN field-effect transistors (FETs) with a SiN x /GaON gate stack have been demonstrated with enhanced stability within a wide range of voltage bias and temperature. In this letter, the gate leakage characteristics and reliability of this unconventional staggered gate stack are investigated. At relatively low gate voltages, the gate current is suppressed owing to the buried-channel structure and the presence of GaON that presents an effective hole barrier. With more negative gate biases, the gate leakage was found to be dominated by the transport of holes that spillover from the p-channel through the SiN x via Poole-Frenkel emission. Based on this gate leakage mechanism at large gate bias, √ E model was used for gate lifetime prediction. The maximum applicable ON-state gate voltage of −7.3 V is obtained for a 10-year lifetime with a 1% gate failure rate. Index Terms-GaN, p-channel, SiN x /GaON gate stack, gate leakage, reliability.
I. INTRODUCTIONG aN-BASED complementary logic (CL) circuits are actively pursued as energy-efficient on-chip peripheral modules for the further advancement of wide-bandgap semiconductor-based electronics [1], [2], [3]. Single-stage inverters with monolithically integrated n-and p-channel fieldeffect transistors (FETs) have been intermittently reported [4], [5], [6]. Recently, a complete set of elementary logic gates and multiple-stage logic circuits with desired "CMOSlike" characteristics have been demonstrated [7]. These results manifested the feasibility of constructing GaN CL circuits and also suggested GaN's power integration as an immediate beneficiary.