2009
DOI: 10.1103/physrevb.80.115331
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Enhancement-mode double-top-gated metal-oxide-semiconductor nanostructures with tunable lateral geometry

Abstract: We present measurements of silicon ͑Si͒ metal-oxide-semiconductor ͑MOS͒ nanostructures that are fabricated using a process that facilitates essentially arbitrary gate geometries. Stable Coulomb-blockade behavior showing single-period conductance oscillations that are consistent with a lithographically defined quantum dot is exhibited in several MOS quantum dots with an open-lateral quantum-dot geometry. Decreases in mobility and increases in charge defect densities ͑i.e., interface traps and fixed-oxide charge… Show more

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Cited by 60 publications
(28 citation statements)
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“…The double-quantum dot is defined using two layers of electrostatic gates (39)(40)(41)(42)(43)(44). The lower layer of depletion gates is shown in Fig.…”
Section: Methodsmentioning
confidence: 99%
“…The double-quantum dot is defined using two layers of electrostatic gates (39)(40)(41)(42)(43)(44). The lower layer of depletion gates is shown in Fig.…”
Section: Methodsmentioning
confidence: 99%
“…In addition, focused ion beam techniques beyond sub-nanometer scale [5][9] have gained an important role as silicon based nano-domain engineering [10], [11], [12] has become one of the most important tool in materials research, low dimensional system electronics, semiconductor manufacturing and nanotechnology overall. Recent experimental investigations of quantum information processing via single electron devices in gate defined quantum dots [13], [14] confirm silicon based spin quantum-information processor as a promising candidate for future quantum computer architectures [15]. In that context series of investigations of electrically [16], [17], [18] and optically [19] induced ion kinetics in solid state quantum systems reveal that focusing of coherent ions through oriented crystal, may enhance precise confinement and manipulation of individual spins in quantum information processing [20], [21].…”
Section: Introductionmentioning
confidence: 99%
“…One-qubit and two-qubit manipulations have been demonstrated in the GaAs quantum-dot systems. 9,[23][24][25][26] In silicon quantum-dot systems, despite difficulties such as the fabrication-induced disorder 27 and the valley degree of freedom, [28][29][30][31] high tunability has been reported 32,33 as a milestone toward coherent control of the qubit.…”
Section: Introductionmentioning
confidence: 99%