1997
DOI: 10.1016/s0925-9635(96)00726-1
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Enhancement/depletion MESFETs of diamond and their logic circuits

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Cited by 60 publications
(30 citation statements)
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“…1 Hydrogen-induced surface conductivity can also be utilized to generate holes with an extremely low activation energy, 2,3 and high-performance devices have been demonstrated using this type of layer. 4,5 n-type doping has been much more elusive, with success in substitutional phosphorus doping achieved by relatively few laboratories; 6 an activation energy of 0.6 eV also makes phosphorus an unsuitable dopant for many applications. However, p-n junctions have been demonstrated utilizing the boron-phosphorus interface.…”
mentioning
confidence: 99%
“…1 Hydrogen-induced surface conductivity can also be utilized to generate holes with an extremely low activation energy, 2,3 and high-performance devices have been demonstrated using this type of layer. 4,5 n-type doping has been much more elusive, with success in substitutional phosphorus doping achieved by relatively few laboratories; 6 an activation energy of 0.6 eV also makes phosphorus an unsuitable dopant for many applications. However, p-n junctions have been demonstrated utilizing the boron-phosphorus interface.…”
mentioning
confidence: 99%
“…On the other hand, it was possible to use hydrogenated diamond surface to fabricate field-effect-transistor structures. 1 The mechanism of this kind of conductivity is still under controversial discussion. Experimentally it was found that, on diamond surfaces which were treated with an oxygen plasma, the surface conductivity vanishes.…”
mentioning
confidence: 99%
“…Then, after electron-beam lithography and self-aligned processes, Al was evaporated directly on H-terminated surface to form a gate contact. The self-aligned process was firstly proposed by Hokazono et al [4]. The details of our processes were described previously [5].…”
Section: Rf Power Diamond Fetsmentioning
confidence: 99%