Enhanced uniformity and durability of antisticking layer in imprinting stamps

Lee, Moon Jae; Cho, Sang Uk; Lee, Sang Mae; Kim, Chang Seok; Jeong, Myung Yung

doi:10.1016/j.apsusc.2012.03.074

Cited by 2 publications

(1 citation statement)

References 9 publications

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“…The anti-sticking layer must be thin and uniform, in order to ensure the optical properties [23,24,25]. The traditional coating is thick and unevenly distributed, for example, a Cu-coated mold with a thin layer of inorganic release agent, such as potassium dichromate, before electrodeposition of Ni [26].…”

Section: Introductionmentioning

confidence: 99%

A Cr Anti-Sticking Layer for Improving Mold Release Quality in Electrochemical Replication of PVC Optical Molds

Yang

et al. 2019

Micromachines

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This paper addresses the issue of mold release quality in an electrochemical replication of an optical polyvinyl chloride (PVC) mold, which has microlens array or microprisms array on its surface. The main idea is to deposit a nanoscale Cr thin layer as an antisticking layer on the PVC mold surface, followed by Ag film deposition as the conductive layer using magnetron sputtering, and finally, a nickel layer is electrochemically deposited on the Ag surface. By doing so, the upripping of the nickel mold from the PVC mold becomes easier, resulting in better mold release quality. The experiment results showed that when the Cr antisticking layer was used, the release strength between the nickel mold and the PVC substrate reduced from 1.94 N/cm to 1.43 N/cm, the surface roughness of the PVC substrate after mold release reduced from 0.60 μm to 0.55 μm, the surface roughness of the nickel mold reduced from 0.63 μm to 0.49 μm, the retroreflection coefficient of the nickel mold increased from 1600 cd·lx−1·m−2 to 2100 cd·lx−1·m−2, and the surface energy of the PVC substrate reduced from 31.47 mN/m to 15.53 mN/m.

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Section: Introductionmentioning

confidence: 99%

A Cr Anti-Sticking Layer for Improving Mold Release Quality in Electrochemical Replication of PVC Optical Molds

Yang

et al. 2019

Micromachines

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Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process

Sun¹,

Tang

Shen³

et al. 2022

Micromachines

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In this paper, a high-precision, low-cost, batch processing nanoimprint method is proposed to process a spherical microlens array (MLA). The nanoimprint mold with high surface precision and low surface roughness was fabricated by single-point diamond turning. The anti-sticking treatment of the mold was carried out by perfluorooctyl phosphoric acid (PFOPA) liquid deposition. Through the orthogonal experiment of hot embossing with the treated mold and subsequent inductively coupled plasma (ICP) etching, the microstructure of MLA was transferred to the silicon substrate, with a root mean square error of 17.7 nm and a roughness of 12.1 nm Sa. The average fitted radius of the microlens array units is 406.145 µm, which is 1.54% different from the design radius.

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Enhanced uniformity and durability of antisticking layer in imprinting stamps

Cited by 2 publications

References 9 publications

A Cr Anti-Sticking Layer for Improving Mold Release Quality in Electrochemical Replication of PVC Optical Molds

A Cr Anti-Sticking Layer for Improving Mold Release Quality in Electrochemical Replication of PVC Optical Molds

Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process

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