Enhanced travel range bipolar tri-electrode electrostatic actuator using extended background electrode

Allameh, Mehdi; Park, Byoungyoul; Shafai, Cyrus

doi:10.1117/12.2607847

Cited by 3 publications

(6 citation statements)

References 9 publications

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“…Restoring spring force method and the FEM method were employed to extract the displacement vs. controlling voltage (V I ) response curves [3]. Each response curve is characterized by the snap-down voltage (V S for conventional) and the displacement range (DS for conventional) before snap-down.…”

Section: Methods and Studiesmentioning

confidence: 99%

Low-Voltage Tri-Electrode Electrostatic Actuator Using Solid Gap-Spacing Materials

Allameh,

Park,

Shafai

2024

Eurosensors 2023

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Section: Methods and Studiesmentioning

confidence: 99%

Low-Voltage Tri-Electrode Electrostatic Actuator Using Solid Gap-Spacing Materials

Allameh,

Park,

Shafai

2024

Eurosensors 2023

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“…The free space between the MEMS and the intermediate electrodes is D 1 = 140 µm, and the space between the intermediate and the primary electrode is D 2 = 490 µm. The D 2 height was selected based on the thickness of the available quartz wafer, and the D 1 height was selected to be about 100-150 µm according to the previous results of [36] which found that having D 2 almost 4-5 times D 1 gives the best performance when there is a solid material such as quartz between intermediate and primary electrodes.…”

Section: Tri-electrode Design Parameters and Simulationmentioning

confidence: 99%

“…In [33,34], a novel tri-electrode topology was introduced to reduce the controlling voltage and increase the deflection range. In this topology, two stacked electrodes are used, forming a compact structure.…”

Section: Introductionmentioning

confidence: 99%

Experimental analysis of a low controlling voltage tri-electrode MEMS electrostatic actuator for array applications

Allameh

Zhou²,

Chen³

et al. 2023

J. Micromech. Microeng.

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A tri-electeode electrostatic actuator with one moving MEMS electrode and two stationary electrodes (tri-electrode actuator topology) is experimentally tested in this article. The stationary controlling (intermediate) electrode is perforated and below the moving MEMS electrode, while the common electrode is further below. Numerical simulations were performed to discover the optimal design parameters for a tri-electrode electrostatic actuator in comparison to a conventional two electrode electrostatic actuator. A silicon-based moving MEMS electrode was designed with a relatively linear spring constant, and the controlling intermediate and primary stationary electrodes were fabricated on either side of a quartz substrate instead of free space to simplify their fabrication. The measurement results showed that the tri-electrode topology can control the displacement of the MEMS with a lower controlling voltage and with extended controllable range before pull-in instability, compared to the conventional actuator. Simulations and measurements showed that the controlling voltage was reduced by 2.6 times compared to the conventional actuator design employing a bipolar driven intermediate electrode, while the controllable deflection range before pull-in was elevated by 33%. This tri-electrode design offers benefits for applications in need of arrays of electrostatic actuators such as deformable mirrors.

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“…However, in regard to the tri-electrode actuator topology [26][27][28], the aim is to reduce the control voltage and also improve the range of motion. This method can be applied to existing parallel-plate electrostatic actuator design, with very minor modifications in the design and fabrication.…”

Section: Introductionmentioning

confidence: 99%

“…This method can be applied to existing parallel-plate electrostatic actuator design, with very minor modifications in the design and fabrication. Also, to further optimize this setup, a more advanced design [29,30] incorporates a solid material that bridges the gap between the stationary electrodes, effectively reducing the fixed voltage needed to operate the actuator. The addition of a solid material to support the region between the two underlying stationary electrodes simplifies fabrication, as only the MEMS actuator itself now needs to be released from the substrate.…”

Section: Introductionmentioning

confidence: 99%

Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator

Allameh,

Park,

Shafai

2024

Sensors

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MEMS electrostatic actuators can suffer from a high control voltage and a limited displacement range, which are made more prevalent by the pull-in effect. This study explores a tri-electrode topology to enable a reduction in the control voltage and explores the effect of various solid materials forming the space between the two underlying stationary electrodes. Employing solid dielectric material simplifies fabrication and can reduce the bottom primary electrode’s fixed voltage. Through numerical analysis, different materials were examined to assess their impact. The results indicate that the primary electrode’s fixed voltage can be reduced with an increase in the dielectric constant, however, with the consequence of reduced benefit to control voltage reduction. Additionally, charge analysis was conducted to compare the actuator’s performance using air as the gap-spacing material versus solid materials, from the perspective of energy conservation. It was found that solid materials result in a higher accumulated charge, reducing the need for a high fixed voltage.

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Enhanced travel range bipolar tri-electrode electrostatic actuator using extended background electrode

Cited by 3 publications

References 9 publications

Low-Voltage Tri-Electrode Electrostatic Actuator Using Solid Gap-Spacing Materials

Low-Voltage Tri-Electrode Electrostatic Actuator Using Solid Gap-Spacing Materials

Experimental analysis of a low controlling voltage tri-electrode MEMS electrostatic actuator for array applications

Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator

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