Enhanced Stretchability of Wavy‐Structured Thermally Grown Silicon Dioxide Films for Stretchable Encapsulation

Abstract

Aligned wavy-structured thermally grown silicon dioxide films are fabricated for stretchable encapsulation films. Uniaxial stretchability is investigated with micromechanics modeling, which can elucidate the stretchability arising from the wavy structure and the properties of the materials. The wavy-structured films with optimum combinations of film thickness and wavy structure show 20.1% of uniaxial stretchability and 1.11 × 10 −6 g m −2 day −1 of water vapor transmission rate (WVTR), simultaneously. It shows highly reliable barrier properties even after 1000 stretching cycles at 90% of their stretchability.

Advancements in atomic-scale interface engineering for flexible electronics: enhancing flexibility and durability

“…Stretchability optimization is achieved by adjusting parameters like amplitude (A 0 ), wavelength (λ 0 ), and the thickness of the thin inorganic film. Kim et al utilizes the etch process to texture the structure with the desired A 0 and λ 0 for fabricating stretchable encapsulation [36]. However, poor mechanical stability was evident, as indicated by WVTR values increasing from 10 −6 g m −2 d −1 to 10 −4 g m −2 d −1 after stretching.…”

“…Polymer nanoparticles exhibit high stretchability but have low barrier properties and mechanical stability [29][30][31][32]. Current methods to achieve stretchability generally involve structural designs that incorporate thin inorganic films and polymer substrates, including gradient/hybrid structures, island structures, and wavy structures in composites [33][34][35][36]. However, in multilayers or composites, issues such as poor interfacial adhesion, interfacial defects, and interfacial stress can lead to stability issues in encapsulation performance [37].…”

“…The MLD thin films adopt the advantages of ALD, possessing additional strengths like flexibility [43], albeit with a reduced barrier property. Given that thin films in both ALD and MLD are deposited in a cyclic manner, precise control over the composition and properties of the resulting thin film can be achieved [35][36][37]. Another technique derived from ALD, atomic layer infiltration (ALI), involves adding an extra holding step in the ALD cycle [44].…”

Recent advances in the construction and application of stretchable PEDOT smart electronic membranes

“…Patterned structures refer to orderly arranged structures, which can be categorized into in-plane and out-of-plane structures. 37 In-plane patterned structures include serpentine, mesh, and wavy structures, 149 while out-of-plane patterned structures include kirigami, origami, honeycomb, and microporous structures. 150 By forming micron or even nano-patterned structures, the surface morphology, optical properties, and mechanical properties can be adjusted, and rigid materials can be endowed with stretchability.…”