Enhanced polarization and endurance properties of ZrO2-based ferroelectric capacitor using HfO2 interfacial layer
Wei Zhang,
Yuxuan Shi,
Bowen Zhang
et al.
Abstract:Recently discovered ferroelectricity in fluorite-structure ZrO2 thin film has attracted increasing and intense interest due to its lower crystallization temperature and higher content in nature in comparison to hafnium oxide. Here, the effect of HfO2 interfacial layer on the ferroelectric properties of ZrO2 thin films is investigated systematically by designing four types of interfacial structures. It is revealed that the ferroelectric orthorhombic phase, remanent polarization, and endurance can be improved in… Show more
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