Pt
nanoparticle (NP)-modified SnO2–ZnO (SnO2–ZnO–Pt) core–shell nanosheets (NSs)
for hydrogen sulfide (H2S) gas sensing were successfully
synthesized via atomic layer deposition, hydrothermal method, and
magnetron sputtering. More importantly, the SnO2–ZnO–Pt
NS sensing materials were synthesized in situ on
microelectromechanical system (MEMS) devices, which are expected to
be high-performance gas sensors with superior sensitivity, great selectivity,
good reproducibility, and low power consumption. To be specific, the
SnO2–ZnO–Pt NSs displayed a high sensitivity
(R
a/R
g) of
30.43 and an excellent selectivity when detecting 5 ppm H2S at an operating temperature of 375 °C. Their rate of resistance
change was 29.43, which was about 24 and 9 times those of the pristine
SnO2 NS (∼1.25) and SnO2–ZnO core–shell
NS (∼3.43) sensors, respectively. These substantially improved
sensing properties could be mainly attributed to the formation of
heterojunctions, catalytic sensitization effect, and increased specific
surface area of Pt NP modification. Thus, the proposed SnO2–ZnO–Pt NS gas sensors demonstrate great potential
as a high-performance sensing material for application in H2S gas sensors.