2011
DOI: 10.1088/0022-3727/44/37/372002
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Enhanced negative ion yields on diamond surfaces at elevated temperatures

Abstract: Boron-doped polycrystalline diamond (BDD) and highly oriented pyrolytic graphite (HOPG) surfaces were exposed to low pressure hydrogen plasma. The relative yields of surface-produced H− ions were measured by an energy analyser quadrupole mass spectrometer. The highest H− yield was obtained at 400 °C for a BDD surface and at room temperature for an HOPG surface. At low ion bombardment energy, the maximum yield on a BDD surface is about 5 times higher than that on an HOPG surface, which has been the best carbon … Show more

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Cited by 34 publications
(70 citation statements)
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“…Calculations concern particles emitted by the surface, while the experiments measure negative ions that are able to reach the mass spectrometer detector. Interestingly, it also suggests that many negative ions emitted by the surface are not collected, and that carbon is probably an even better negative ion enhancer than previously thought 62 . Figure 6 also shows that above 80eV the sputtering contribution starts to decrease.…”
Section: Iii) Idf Versus Positive Ion Energymentioning
confidence: 83%
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“…Calculations concern particles emitted by the surface, while the experiments measure negative ions that are able to reach the mass spectrometer detector. Interestingly, it also suggests that many negative ions emitted by the surface are not collected, and that carbon is probably an even better negative ion enhancer than previously thought 62 . Figure 6 also shows that above 80eV the sputtering contribution starts to decrease.…”
Section: Iii) Idf Versus Positive Ion Energymentioning
confidence: 83%
“…Experimentally, HOPG surfaces were used, but upon bombardment, some defects are created in the material and it is partially amorphized 62 up to a depth that depends on the positive ion energy. Furthermore some hydrogen (or deuterium) species are implanted in the material.…”
Section: C-srim Calculationsmentioning
confidence: 99%
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