“…Various passivation layers, including organic, inorganic, and organic/inorganic hybrid options have been applied to ITZO TFTs, leading to enhanced electrical performance and stability consistent with our findings. 9,14,15,18,19,37 Notably, our spincoated HMDS passivation layer stands out as a cost-effective alternative among the various organic-solution-based passivation layers. HMDS passivation layers exhibit a similar ability to react with −OH groups as other organic self-assembled monolayer passivation layers, such as n-octyltriethoxysilane and n-octadecyltrichlorosilane.…”