Enhanced depth control of ultrafast laser micromachining of microchannels in soda-lime glass

Rodríguez, Ainara; Arriola, Alexander; Tavera, T.; Pérez, Noemí; Olaizola, Santiago M.

doi:10.1016/j.mee.2012.06.021

Cited by 11 publications

(8 citation statements)

References 17 publications

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“…Equation 1 is based on a theoretical calculation for a single, isolated ablation site. It has been previously discussed that the production of microchannels can result in ablation rates which are higher than expected theoretically due to ablated material being allowed to escape from the previously processed area [25]. Furthermore, as the ablation rate calculation does not incorporate changes in the threshold fluence because of the "incubation effect", some deviation from the theory is expected.…”

Section: Ablation Ratementioning

confidence: 97%

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Microchannel fabrication on cyclic olefin polymer substrates via 1064 nm Nd:YAG laser ablation

McCann

Bagga

Groarke

2016

Applied Surface Science

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This paper presents a method for fabrication of microchannels on cyclic olefin polymer films that have application in the field of microfluidics and chemical sensing. Continuous microchannels were fabricated on 188-µm-thick cyclic olefin polymer substrates using a picosecond pulsed 1064 nm Nd:YAG laser. The effect of laser fluence on the microchannel morphology and dimensions was analysed via scanning electron microscopy and optical profilometry. Single laser passes were found to produce v-shaped microchannels with depths ranging from 12 to 48 µm and widths from 44 to 154 2 µm. The ablation rate during processing was lower than predicted theoretically. Multiple laser passes were applied to examine the ability for finer control over microchannel morphology with channel depths ranging from 22 µm to 77 µm and channel widths from 59 µm to 155 µm. For up to five repeat passes, acceptable reproducibility was found in the produced microchannel morphology. Infrared spectroscopy revealed that the polymer surface chemistry was not significantly altered via the laser ablation process. These results were compared to other work conducted on cyclic olefin polymers.

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Section: Ablation Ratementioning

confidence: 97%

“…The number of laser pulses, N, incident per unit area in a scanning beam can be estimated from the laser pulse repetition frequency, f, the beam waist, w 0 , and scan rate, v, as follows [25]:…”

Section: Calculation Of Ablation Ratementioning

confidence: 99%

Microchannel fabrication on cyclic olefin polymer substrates via 1064 nm Nd:YAG laser ablation

McCann

Bagga

Groarke

2016

Applied Surface Science

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“…These advantages promoted the growth of publications on fabrication of microchannels by femtosecond laser radiation on surfaces of glass, silicon and polymers. However, low repetition rates (1-5 kHz) and slow positioning stages were employed in most articles [12][13][14][15][16]. Moreover, microchannels were post-processed by selective chemical etching in a hydrofluoric acid (HF) solution, which makes fabrication of microchannels with required characteristics less controllable, lowers the productivity, and thus diminishes the advantages of laser technologies [17].…”

Section: Introductionmentioning

confidence: 99%

High-speed and crack-free direct-writing of microchannels on glass by an IR femtosecond laser

Bulushev

Bessmeltsev

Dostovalov

et al. 2016

Optics and Lasers in Engineering

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“…By adjusting adequately the anodization conditions, pores nucleate at the intersections of the imprinted lines and also at the center of the rhombi thank to the self-repairing mechanism described by Masuda et al [73]. Finally, laser interference lithography is also specially adequate for prepatterning aluminum in order to produce highly ordered p-AAO, as the interference pattern is highly periodic and naturally extending on a long range [74,75].…”

Section: Photonic Properties: Interaction Of Light With P-aao Nanostrmentioning

confidence: 99%

Optical Properties of Nanoporous Anodic Alumina and Derived Applications

et al. 2015

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Inexpensive formation of periodically ordered structures with periodicities and feature sizes lower than 100 nm has triggered a vast amount or research in recent years. Of particular interest in nanotechnology is the nanoporous alumina, which can be produced with a self-organized arrangement of pores in the adequate anodization conditions. Most of the interest of this material is based in its outstanding physical and chemical and properties, and more specifically in its optical properties. The interaction of light with the nanostructured porous alumina gives rise to a wealth of optical properties that have their interest both in research level and also in application. In this work we aim at giving an extensive review of the published research on the optical properties of nanoporous alumina. The review will account for the different studied optical properties of this material such as the existence of a photonic stop band originated from its quasi-random nanostructure, the interferometric and light guiding properties that can be applied to biosensing, the structure nanoengineering to achieve more complex photonic behaviour such as distributed-Bragg reflectors or rugate filters, and the photoluminescence properties. In a second part, a summary of the different applications proposed on the basis of these properties, such as in biotechnology or energy will be given. IntroductionAmong the different features and properties of porous anodic alumina (p-AAO), its optical properties are of special interest and have been the subject of very intensive research. The interaction of light with p-AAO can be analyzed from different points of view: the material interaction, the porous structure interaction or the relation of geometrical features of the nanostructure (periodicity or quasi-periodicity, distance

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Enhanced depth control of ultrafast laser micromachining of microchannels in soda-lime glass

Cited by 11 publications

References 17 publications

Microchannel fabrication on cyclic olefin polymer substrates via 1064 nm Nd:YAG laser ablation

Microchannel fabrication on cyclic olefin polymer substrates via 1064 nm Nd:YAG laser ablation

High-speed and crack-free direct-writing of microchannels on glass by an IR femtosecond laser

Optical Properties of Nanoporous Anodic Alumina and Derived Applications

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