Enhanced boron doping of thin diamond films grown in deuterium-rich microwave plasma

Bogdanowicz, Robert; Sobaszek, Michał; Sawczak, Mirosław; Grigorian, G. M.; Ficek, Mateusz; Caban, P.; Herman, Aleksander; Cenian, Adam

doi:10.1016/j.diamond.2019.05.005

Cited by 6 publications

(5 citation statements)

References 48 publications

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“…Theoretically, the refractive index of the material changes with the variation of wavelength, so the optical performance is a function of wavelength variation. [20][21][22] For this purpose, we use spectroscopic ellipsometry (SE) to investigate the optical properties of MCD films over the spectral wavelength range of 380 nm-1000 nm. The structural characteristics of the diamond film are affected by deposition conditions, such as temperature, growth rate, ion assist, pressure, etc.…”

Section: Resultsmentioning

confidence: 99%

Influences of grain size and microstructure on optical properties of microcrystalline diamond films*

Wang¹,

Chen²,

Li³

et al. 2020

Chinese Phys. B

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Microcrystalline diamond (MCD) films with different grain sizes ranging from 160 nm to 2200 nm are prepared by using a hot filament chemical vapor deposition (HFCVD) system, and the influences of grain size and structural features on optical properties are investigated. The results show that the film with grain size in a range of 160 nm–310 nm exhibits a higher refractive index in a range of (2.77–2.92). With grain size increasing to 620±300 nm, the refractive index shows a value between 2.39 and 2.47, approaching to that of natural diamond (2.37–2.55), and a lower extinction coefficient value between 0.08 and 0.77. When the grain size increases to 2200 nm, the value of refractive index increases to a value between 2.66 and 2.81, and the extinction coefficient increases to a value in a range of 0.22–1.28. Visible Raman spectroscopy measurements show that all samples have distinct diamond peaks located in a range of 1331 cm−1–1333 cm−1, the content of diamond phase increases gradually as grain size increases, and the amount of trans-polyacetylene (TPA) content decreases. Meanwhile, the sp2 carbon clusters content and its full-width-at-half-maximum (FWHM) value are significantly reduced in MCD film with a grain size of 620 nm, which is beneficial to the improvement of the optical properties of the films.

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Section: Resultsmentioning

confidence: 99%

Influences of grain size and microstructure on optical properties of microcrystalline diamond films*

Wang¹,

Chen²,

Li³

et al. 2020

Chinese Phys. B

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“…The temperature of the heated stage was set to 700 °C, the process pressure to 50 Torr (6.7 kPa), and the microwave power to 1300 W. According to a previous paper the calculated growth rates 4.05 and 1.79 nm min −1 for the BDD@H and BDD@D, respectively. [ 32 ] Temperature measured by pyrometer in both cases oscillates from 800 to 1000 °C. Diborane (B 2 H 6 ) was used as a boron source.…”

Section: Methodsmentioning

confidence: 99%

“…[31] This translates to a more effective boron incorporation into the diamond lattice, reaching a charge carrier density one order of magnitude higher for a sample deposited in deuterium-rich plasma. [32] Diamond has unique electronic and chemical properties that make it an attractive material for use in catalysis, photocatalysis, and electroanalysis. One of the key advantages of doped diamond is its high electrical conductivity induced by boron, which makes it an excellent electrode material for electroanalysis.…”

Section: Introductionmentioning

confidence: 99%

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Highly Occupied Surface States at Deuterium‐Grown Boron‐Doped Diamond Interfaces for Efficient Photoelectrochemistry

Sobaszek

Brzhezinskaya

Olejnik

et al. 2023

Small

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Polycrystalline boron‐doped diamond is a promising material for high‐power aqueous electrochemical applications in bioanalytics, catalysis, and energy storage. The chemical vapor deposition (CVD) process of diamond formation and doping is totally diversified by using high kinetic energies of deuterium substituting habitually applied hydrogen. The high concentration of deuterium in plasma induces atomic arrangements and steric hindrance during synthesis reactions, which in consequence leads to a preferential (111) texture and more effective boron incorporation into the lattice, reaching a one order of magnitude higher density of charge carriers. This provides the surface reconstruction impacting surficial populations of CC dimers, CH, CO groups, and COOH termination along with enhanced kinetics of their abstraction, as revealed by high‐resolution core‐level spectroscopies. A series of local densities of states were computed, showing a rich set of highly occupied and localized surface states for samples deposited in deuterium, negating the connotations of band bending. The introduction of enhanced incorporation of boron into (111) facet of diamond leads to the manifestation of surface electronic states below the Fermi level and above the bulk valence band edge. This unique electronic band structure affects the charge transfer kinetics, electron affinity, and diffusion field geometry critical for efficient electrolysis, electrocatalysis, and photoelectrochemistry.

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“…It is necessary to tune the mechanical, electrical, and chemical properties to specific applications. The most common strategy for modifying CVD diamond layers is doping with boron and nitrogen [ 17 , 18 ], which results in a Fermi level shift and changes in the band gap. A wide range of physical or mechanical properties of CVD diamonds depends on the ratio of the sp 2 and sp 3 phase [ 19 , 20 , 21 , 22 ].…”

Section: Introductionmentioning

confidence: 99%

Impact of Methanol Concentration on Properties of Ultra-Nanocrystalline Diamond Films Grown by Hot-Filament Chemical Vapour Deposition

et al. 2021

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Diamond is a very interesting material with a wide range of properties, making it highly applicable, for example, in power electronics, chemo- and biosensors, tools’ coatings, and heaters. Due to the high demand for this innovative material based on the properties it is already expected to have, it is important to obtain homogeneous diamond layers for specific applications. Doping is often chosen to modify the properties of layers. However, there is an alternative way to achieve this goal and it is shown in this publication. The presented research results reveal that the change in methanol content during the Hot Filament Chemical Vapour Deposition (HF CVD) process is a sufficient factor to tune the properties of deposited layers. This was confirmed by analysing the properties of the obtained layers, which were determined using Raman spectroscopy, scanning electron microscopy (SEM), X-ray diffraction (XRD), and an atomic force microscope (AFM), and the results were correlated with those of X-ray photoelectron spectroscopy (XPS). The results showed that the increasing of the concentration of methanol resulted in a slight decrease in the sp3 phase content. At the same time, the concentration of the -H, -OH, and =O groups increased with the increasing of the methanol concentration. This affirmed that by changing the content of methanol, it is possible to obtain layers with different properties.

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Enhanced boron doping of thin diamond films grown in deuterium-rich microwave plasma

Cited by 6 publications

References 48 publications

Influences of grain size and microstructure on optical properties of microcrystalline diamond films*

Influences of grain size and microstructure on optical properties of microcrystalline diamond films*

Highly Occupied Surface States at Deuterium‐Grown Boron‐Doped Diamond Interfaces for Efficient Photoelectrochemistry

Impact of Methanol Concentration on Properties of Ultra-Nanocrystalline Diamond Films Grown by Hot-Filament Chemical Vapour Deposition

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