lead to a nontrivial electronic coupling at the Si/MoS 2 heterosheet (HS) interface with possible impact on the electronic and optical applications. Indeed, interfacing MoS 2 with conventional semiconductors recently has recently led to the realization of a subthermionic tunnel FET, [ 12 ] and it was proposed as a feasible avenue for an improved photodetection [ 13 ] and enhanced photoresponsive behavior. [ 14 ] In the present work, our aim is to unravel the electronic band line-up at the HS interface between Si and MoS 2 , and to correlate it with the electrical response of the resultant HS-FET after stabilizing the Si NS with an Al 2 O 3 encapsulation layer. To this purpose, in situ angle-resolved photoemission spectroscopy (ARPES) from a synchrotron radiation (SR) source (photon energy h ν = 100 eV) and in situ nonmonochromatic laboratory X-ray photoemission spectroscopy (XPS) from a Mg Kα (photon energy h ν = 1253.6 eV) source were respectively used to inspect the valence band structure at the Si/MoS 2 HS interface and the chemical stability prior to and after encapsulation. In particular, based on highresolution SR-PES, the Si NS is observed to bend the electronic bands of the MoS 2 topmost layers enough to cause an electron accumulation at the Si/MoS 2 HS interface. This feature deeply infl uences the HS-FET response by inducing an effective n -type doping in the topmost MoS 2 region.
Structural Details of the Si/MoS 2 Heterosheet InterfaceThe fi rst Brillouin zone of the prepared MoS 2 (0001) surface (see the Experimental Section) is displayed by the low energy electron diffraction (LEED) pattern in Figure 1 a that reproduces a hexagonal reciprocal lattice cell. A similar LEED pattern has been observed in Figure 1 b after Si NS deposition at 200 °C. This fact is consistent with a pseudomorphic growth of an Si monolayer mimicking the MoS 2 surface structure as previously reported. [ 11 ] The growth of the Si NS has been chemically identifi ed by means of in situ XPS monitoring of the Si 2 p core level photoemission line as a function of the take-off angle (TOA), i.e., the angle between the photoelectron beam and the nominal surface plane. The angular dependence of the Si 2 p line is reported in Figure 1