Energy flux measurements on an atmospheric pressure surface barrier discharge

Hansen, Luka; Reck, Kristian A.; Kersten, Holger

doi:10.1088/1361-6463/ab216c

Cited by 13 publications

(8 citation statements)

References 37 publications

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“…The PTP, which will be discussed in more detail below, is based on the determination of the temporal change of surface temperature of the probe during a heating phase with plasma operation and a cooling phase with plasma off [252,253]. By knowing the heat capacity of the sensor, the difference of the time derivatives yields the integral energy influx to the surface.…”

Section: Calorimetric Probesmentioning

confidence: 99%

“…By the established PTP method one can obtain deeper insight in the involved physical and chemical processes of plasma-wall interaction as well as practical numbers (deposited power in W cm −2 or eV/particle and critical temperatures in K) for simple process control and monitoring. The principle and examples for operation of a PTP have been demonstrated for several cases of process plasmas like ion beam operation [235], plasma ion immersion implantation [259], magnetron sputtering [255,256,260,261] and also for atmospheric pressure plasmas, for example, a coplanar surface barrier discharge [253].…”

Section: Calorimetric Probesmentioning

confidence: 99%

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Foundations of measurement of electrons, ions and species fluxes toward surfaces in low-temperature plasmas

Benedikt

Kersten

Piel

2021

Plasma Sources Sci. Technol.

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This foundation article discusses the diagnostics of electrons and ions in plasmas and fluxes of charged and neutral species toward plasma-facing surfaces by non-optical methods. The focus is laid on the fundamentals of the most common methods and their application to non-equilibrium low-pressure electropositive plasmas and ion beams. The key topics are Langmuir probes (LPs), Faraday cups (FCs) and energy analyzers, mass spectrometry, as well as novel calorimetric and force probes (FPs). For each method, the concepts are introduced, hints at best practice are given, and a survey of the recently published literature is included. Starting with the sheath–plasma boundary, the principles of plane and cylindrical LPs and the measurement of electron temperature and density are discussed. Beyond standard textbooks, double, triple and emissive probes are described and modulation techniques for obtaining the electron energy distribution function are presented. More technical issues related to probe compensation in radio-frequency plasmas, probe contamination, and the influence of a magnetic field are also included. The presentation is completed by modern radio-frequency techniques, such as impedance probes, multipole resonance probes, and self-excited electron resonance spectroscopy. FCs, retarding field analyzers (RFAs) as well as novel calorimetric and FPs are useful tools for the measurement of overall, not species resolved, ions and neutral species fluxes toward surfaces. RFAs provide overall ion energy distribution functions, whereas calorimetric and FPs can deliver information about fluxes of fast neutrals. The issues related to secondary electron emission, absolute signal calibration, and analysis of plasmas with complex chemistry are discussed. Mass spectrometry diagnostics is capable of mass and energy-resolved detection of ions and neutral species at the plasma-facing surfaces. Detection, identification and absolute density calibration of neutral stable and radical species are treated in detail and peculiarities of ion mass spectrometry, such as detection of negative ions, ion measurements in front of powered electrodes, or chromatic aberration and acceptance angle limitations in energy spectrum measurements are introduced.

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Section: Calorimetric Probesmentioning

confidence: 99%

Section: Calorimetric Probesmentioning

confidence: 99%

Foundations of measurement of electrons, ions and species fluxes toward surfaces in low-temperature plasmas

Benedikt

Kersten

Piel

2021

Plasma Sources Sci. Technol.

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“…The operating principle is based on reference [19] and the design has been refined in recent years to measure energy fluxes mainly in low pressure environments (P 50 Pa) [20][21][22][23][24]. With the increasing relevance of atmospheric pressure plasmas, there have been efforts to make this diagnostic available for high and low energy plasma jets [16,17,[25][26][27] and surface barrier discharges [28].…”

Section: Introductionmentioning

confidence: 99%

Energy transfer in interaction of a cold atmospheric pressure plasma jet with substrates

Hansen¹,

Goldberg²,

Feng³

et al. 2021

Plasma Sources Sci. Technol.

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The energy flux of a nanosecond pulsed cold atmospheric pressure (CAP) plasma jet in contact with a substrate surface was measured to improve the understanding of the correlation between energy flux, flow dynamics and applied electrical power. The flow pattern properties of the CAP jet were imaged using Rayleigh scattering showing a transition from laminar to turbulent flow at Reynolds number of 700, significantly smaller than the conventional critical Reynolds number of 2040. The energy flux to the surface was determined using a passive thermal probe as a substrate dummy. As expected, the energy flux decreases with increasing distance to the nozzle. Measurements of the floating potential of the probe revealed a strong positive charging (up to 165 V) attributed to ion flux originating mainly from Penning ionization by helium metastables. Negative biasing of the probe doubled the energy flux and showed a significantly increased ion contribution up to a nozzle distance of 6 mm to the surface. For positive biasing an increased contribution of electrons and negative ions was only found at 3 mm distance. The relevance of particle transport to the surface is shown by switching from laminar to turbulent flow resulting in a decreased energy flux. Furthermore, a linear correlation of energy flux and input power was found.

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“…This high-power setup with a diffuse discharge appearance enables overcoming of inhomogeneities potentially arising from the microdischarge structure of barrier discharges (Ráhel' and Sherman 2005;Č ech et al 2015), thus achieving highly homogeneous treatments and an enhanced scalability of the technology (Š těpánová et al 2017). The discharge has since been intensely investigated and characterized, including by mass spectrometry (Lazovic et al 2008;Č ech et al 2017), optical emission spectroscopy (Č ech et al 2008;Tučeková et al 2013), energy flux measurements (Hansen et al 2019), cross-correlation spectroscopy (Hoder et al 2008(Hoder et al , 2009, numerical simulations and fast optical imaging (Č ech et al 2014). Design considerations include the thickness of the dielectric barrier (Č ech et al 2014).…”

Section: Introductionmentioning

confidence: 99%

An open-source surface barrier discharge plasma pretreatment for reduced cracking of outdoor wood coatings

et al. 2021

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The development of a simple surface barrier discharge plasma device is presented to enable more widespread access to and utilization of plasma technology. The application of the plasma device was demonstrated for pretreatment of wood prior to application of protective coatings for outdoor usage. The coatings' overall performance was increased, showing a reduction or absence of cracking due to weathering on plasma-pretreated specimens. Moreover, after ten months of outdoor weathering, the plasma-pretreated specimens showed fewer infections with biotic factors and improved adhesion performance in cross-cut tests, while the surface gloss performed independently from plasma pretreatment. In contrast to that, plasma-pretreated specimens were slightly more prone to discoloration due to outdoor weathering, whereas the plasma pretreatment did not impact the initial color after coating application. Graphic abstract

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Energy flux measurements on an atmospheric pressure surface barrier discharge

Cited by 13 publications

References 37 publications

Foundations of measurement of electrons, ions and species fluxes toward surfaces in low-temperature plasmas

Foundations of measurement of electrons, ions and species fluxes toward surfaces in low-temperature plasmas

Energy transfer in interaction of a cold atmospheric pressure plasma jet with substrates

An open-source surface barrier discharge plasma pretreatment for reduced cracking of outdoor wood coatings

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