A comprehensive mass-spectrometry study of a set of poly(alkyl acrylate) layers synthesized by atmospheric pressure plasma-initiated chemical vapor deposition (AP-PiCVD) is provided. High-resolution mass spectrometry investigations demonstrate that exposure of the alkyl acrylate monomers to ultra-short and lowfrequency plasma pulses produces a defined number of radical and neutral fragments, which can play both the roles of polymerization initiation or termination groups. Further inquiries illustrate the competition between a conventional free-radical polymerization pathway and plasma-polymerization. On the basis of the massspectrometry observations and the bond dissociation energies calculated by density functional theory, guidelines are made to select appropriate AP-PiCVD monomers.
K E Y W O R D Satmospheric-plasma CVD, conventional polymerization, high-resolution mass-spectrometry, nanopulsed discharge, polymerization mechanisms 1 | INTRODUCTION In many synthesis reactions, plasma provides a convenient alternative to thermal heating [1] or chemical reactants. [2] Noticeably, plasma-enhanced chemical vapor deposition (PECVD) processes can lead to the simultaneous lowtemperature synthesis and deposition of crystalline metal oxide thin films on polymer substrates [3] or ensure the "polymerization" of chemically non-polymerizable precursors. [4,5] The PECVD of many inorganic and organic materials has already been reported and the fine-tuning of the PECVD parameters, e.g., the composition of the plasma gas and the plasma excitation mode, can trigger a wide range of reactions, including the reduction of metal salts, [6] the oxidative polymerization of aromatic compounds, [2] and the free-radical polymerization of vinylene monomers. [7] Nevertheless, due to the intrinsic nature of plasmas, consisting of many reactive species with a wide energy range, a nonnegligible number of side reactions occurs. [2] As a consequence to the non-specificity of plasma-induced reactions and the sensitivity of the organic bonds, the chemical structure of monomers is only partially retained and the resulting PECVD This is an open access article under the terms of the Creative Commons Attribution-NonCommercial-NoDerivs License, which permits use and distribution in any medium, provided the original work is properly cited, the use is non-commercial and no modifications or adaptations are made.