Abstract:We present results for the first phase of an effort to develop large-grain (>l-mm), highly-oriented, thin (0.5 to 5 micron) films of germanium on substrates of: 1. fused silica (Si&), 2. sintered alumina (AI~OJ) ceramic, or 3. low-cost polysilicon sheet (Silicon-Filmm) material. We use a water-vapor mediated, close-spaced vapor transport (CSVr) process to deposit Ge, followed by a recrystallization step. An alternative chemical vapor transport process using iodine vapor is also being developed for lowcost depo… Show more
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