2017
DOI: 10.1049/el.2017.2714
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Enabling PZT bimorph actuator with passive polysilicon structure

Abstract: For the first time, a bimorph thin film lead zirconate titanate (PZT) micro-actuator with thick polysilicon as a passive structural layer is reported. A simple micro-cantilever actuator consisting of 1000 µm long and 250 µm wide with 4 µm thick polysilicon structure flanked by a piezoelectric active layer on the top and bottom side has been fabricated to demonstrate such novel bimorph configuration. The actuator displays a flat profile with only 2 µm of tip deflection which indicates a balanced stress distribu… Show more

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