The cost-effective and environment-friendly template of LaMnO 3 /epi-MgO/ion beam-assisted deposited (IBAD-)MgO/solution deposition planarized (SDP) Y 2 O 3 /Hastelloy tape was used as the substrate, on which the technique of metal organic chemical vapor deposition (MOCVD) has been applied to depositing 1.2-μm-thick YBa 2 Cu 3 O 7−x (YBCO) films by modulating the substrate temperature ranging from 750 to 850 • C. The effects of substrate temperature on the preferential orientation, textures, surface morphology, and performance of the YBCO films were systematically investigated. X-ray diffraction and scanning electron microscope revealed that as substrate temperature increased from 750 to 810 • C, the orientation of YBCO films was transferred from the a-axis to the c-axis; meanwhile, the textures were improved and the films became denser. However, as the substrate temperature rose above 810 • C, the composition distributions and textures of YBCO films degraded quickly, and the films were barium-poor with CuYO 2 impurity arising, of which all negatively affected the critical current density (J c ) of YBCO films. Around 810 • C, the YBCO film was of the best crystallization and microstructure as well as highly epitaxial growth, leading to the highest J c of 1.8 MA/cm 2 at 77 K and self-field.