Abstract:In this work, we propose a new optical measurement method and setup to investigate the dynamic behavior of a pneumatically driven diaphragm micropump in a microfluidic system. The presented method allows a contact-free spatially and temporally resolved determination of the membrane displacement. Hence, it enables to derive the volume flow rate, generated by the micropump. The method is based on the Lambert–Beer law, which describes the intensity weakening of light traveling through a medium with an absorbing s… Show more
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