2022
DOI: 10.1109/ojnano.2022.3217806
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Emerging Plasma Nanotechnology

Abstract: Developments in plasma process technology have led to innovative advances in the miniaturization and integration of semiconductor devices. However, when semiconductor devices are utilized in the nanoscale domain, defects or damage related to charged particles and ultraviolet (UV) rays emitted from the plasma can emerge, resulting in degraded characteristics for nanodevices. It is thus imperative to come up with a method that suppresses or controls the charge accumulation and ultraviolet (UV) damage in plasma p… Show more

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“…Technology scalability increases performance but has drawbacks as well [8], [9], [10]. These problems can be solved by innovative nano-electronics devices, opening up new domains for information processing and heterogeneous 3D integration [11].…”
Section: Figure 1 Moore's Law Applied To Technology Trendmentioning
confidence: 99%
“…Technology scalability increases performance but has drawbacks as well [8], [9], [10]. These problems can be solved by innovative nano-electronics devices, opening up new domains for information processing and heterogeneous 3D integration [11].…”
Section: Figure 1 Moore's Law Applied To Technology Trendmentioning
confidence: 99%