Embossing technique for fabricating integrated optical components in hard inorganic waveguiding materials

Abstract

We describe a novel embossing technique for fabricating integrated optical components in hard and resistant inorganic waveguiding materials of good optical quality. The desired structure is embossed into a dip-coated deformable gel film prepared from organometallic solutions. Subsequent heat treatment transforms it into inorganic hard oxide material. We have successfully fabricated surface-relief gratings with 1200 lines/mm on SiO(2)-TiO(2) waveguides (with refractive index n(F) approximately 1.8, thickness d(F) approximately 120 nm, and loss <1 dB/cm). The embossed gratings served as input and output grating couplers and as Bragg reflectors. We propose to fabricate other integrated optical components, for example, channel waveguides, with this method.

Sensor properties of planar waveguide structures with grating couplers

“…Such phenomena bring about the change of effective refractive indexes of the modes propagating in the structure, which can be measured with the use of interferometers or grating couplers [5]. Grating couplers as sensor elements were for the first time applied by the research team of Lukosz [6][7][8][9]. The application of grating couplers for sensor purposes was also thoroughly investigated by Kuntz et al [10][11][12].…”

Impressing technology of optical Bragg’s gratings on planar optical sol-gel waveguides

“…The method of mechanical imprinting in the production of periodical structures in a planar waveguide of the type SiO 2 -TiO 2 was applied by Lukosz and Tiefenthaler [20]. The obtained structures were used by the authors as Bragg's grating couplers and mirrors.…”

Ultraviolet and Visible Spectroscopy

“…Another resonance technique involves the use of grating couplers, introduced by LUKOSZ [206,207]. These can be obtained from the ASI company in Z€ urich.…”