7745wileyonlinelibrary.com more complex structures. These structures include multilayered membranes, [ 11,12 ] metallized dielectric membranes with or without molecular coatings, [13][14][15] and membranes equipped with nanoelectrodes. [16][17][18][19][20] In all these cases, the architecture of these advanced nanopore devices involve at least one conductive metallic fi lm. Such conductive layers are intended to read alternative electrical signals, such as an induced charge, [ 21,22 ] potential [ 23 ] and transverse tunneling current, [ 24 ] or to control the motion of biopolymers during passage by modulating a local electric fi eld, [ 25 ] or by providing binding sites for biomolecules. [ 14 ] However, the throughput at which these complex structures can be tested under different operating conditions is a major bottleneck that impedes faster progress in the fi eld. This is, in part, a consequence of the nanopore fabrication approaches currently being employed, which negatively affects the yield of functional devices. Nanofabrication strategies relying on beams of energetic particles, either electrons or ions, require expensive, complex equipment that are inherently low throughput and involve multiple handling steps. Recently, our group has demonstrated that dielectric breakdown can be utilized to create individual nanopores on bare insulating solid-state membranes [ 26 ] and reliably achieve sub-2-nm feature size. [ 27 ] In addition, this technique creates nanopores directly in an aqueous solution, thus completely eliminating issues related to wetting and signifi cantly reducing handling risks. The simplicity in fabrication and workfl ow offered by the method will likely help increase the research output of many groups and render the fi eld accessible to others. Nevertheless, the capacity of this method to fabricate nanopores in more complex membrane structures remains to be explored. This article describes the fabrication of individual nanopores on metallized dielectric membranes using controlled breakdown (CBD), and introduces a high-electric fi eld pulsing strategy where the voltage across the metallized membrane is stepped between a long, low monitoring voltage and a brief, higher fabrication voltage. Finally, the translocation kinetics of short single-stranded DNA molecules through these metallized nanopores is presented. This study lays the foundation for future work to employ CBD for the fabrication of nanopores in more complex membrane structures, incorporating metallic materials, such as nanofl uidic transistors or devices equipped with nanoelectrodes.
Long Passage Times of Short ssDNA Molecules through Metallized Nanopores Fabricated by Controlled BreakdownHarold Kwok , * Matthew Waugh , José Bustamante , Kyle Briggs , and Vincent Tabard-Cossa * The fabrication of individual nanopores in metallized dielectric membranes using controlled breakdown directly in solution is described. Nanopores as small as 1.5-nm in diameter are fabricated in Au-coated silicon nitride membranes immersed in 1 M KCl by subjec...